JPS5641166B2 - - Google Patents

Info

Publication number
JPS5641166B2
JPS5641166B2 JP6737876A JP6737876A JPS5641166B2 JP S5641166 B2 JPS5641166 B2 JP S5641166B2 JP 6737876 A JP6737876 A JP 6737876A JP 6737876 A JP6737876 A JP 6737876A JP S5641166 B2 JPS5641166 B2 JP S5641166B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6737876A
Other languages
Japanese (ja)
Other versions
JPS52149967A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6737876A priority Critical patent/JPS52149967A/ja
Publication of JPS52149967A publication Critical patent/JPS52149967A/ja
Publication of JPS5641166B2 publication Critical patent/JPS5641166B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Mechanical Treatment Of Semiconductor (AREA)
JP6737876A 1976-06-08 1976-06-08 Peeling method of wafers Granted JPS52149967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6737876A JPS52149967A (en) 1976-06-08 1976-06-08 Peeling method of wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6737876A JPS52149967A (en) 1976-06-08 1976-06-08 Peeling method of wafers

Publications (2)

Publication Number Publication Date
JPS52149967A JPS52149967A (en) 1977-12-13
JPS5641166B2 true JPS5641166B2 (US07534539-20090519-C00280.png) 1981-09-26

Family

ID=13343281

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6737876A Granted JPS52149967A (en) 1976-06-08 1976-06-08 Peeling method of wafers

Country Status (1)

Country Link
JP (1) JPS52149967A (US07534539-20090519-C00280.png)

Also Published As

Publication number Publication date
JPS52149967A (en) 1977-12-13

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