JPS5639051B2 - - Google Patents

Info

Publication number
JPS5639051B2
JPS5639051B2 JP9816572A JP9816572A JPS5639051B2 JP S5639051 B2 JPS5639051 B2 JP S5639051B2 JP 9816572 A JP9816572 A JP 9816572A JP 9816572 A JP9816572 A JP 9816572A JP S5639051 B2 JPS5639051 B2 JP S5639051B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9816572A
Other languages
Japanese (ja)
Other versions
JPS4956588A (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9816572A priority Critical patent/JPS5639051B2/ja
Publication of JPS4956588A publication Critical patent/JPS4956588A/ja
Publication of JPS5639051B2 publication Critical patent/JPS5639051B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
JP9816572A 1972-09-30 1972-09-30 Expired JPS5639051B2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9816572A JPS5639051B2 (US20090163788A1-20090625-C00002.png) 1972-09-30 1972-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9816572A JPS5639051B2 (US20090163788A1-20090625-C00002.png) 1972-09-30 1972-09-30

Publications (2)

Publication Number Publication Date
JPS4956588A JPS4956588A (US20090163788A1-20090625-C00002.png) 1974-06-01
JPS5639051B2 true JPS5639051B2 (US20090163788A1-20090625-C00002.png) 1981-09-10

Family

ID=14212463

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9816572A Expired JPS5639051B2 (US20090163788A1-20090625-C00002.png) 1972-09-30 1972-09-30

Country Status (1)

Country Link
JP (1) JPS5639051B2 (US20090163788A1-20090625-C00002.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56133835A (en) * 1980-03-24 1981-10-20 Nec Home Electronics Ltd Manufacture of semiconductor device
JPH0311217A (ja) * 1989-06-07 1991-01-18 Kawasaki Steel Corp プラズマ溶融炉の操業方法
JP2981673B2 (ja) * 1990-05-31 1999-11-22 セイコーインスツルメンツ株式会社 半導体基板の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (US20090163788A1-20090625-C00002.png) * 1971-09-15 1973-06-01
JPS4855586A (US20090163788A1-20090625-C00002.png) * 1971-11-13 1973-08-04
JPS4915114A (US20090163788A1-20090625-C00002.png) * 1972-06-02 1974-02-09

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4837232A (US20090163788A1-20090625-C00002.png) * 1971-09-15 1973-06-01
JPS4855586A (US20090163788A1-20090625-C00002.png) * 1971-11-13 1973-08-04
JPS4915114A (US20090163788A1-20090625-C00002.png) * 1972-06-02 1974-02-09

Also Published As

Publication number Publication date
JPS4956588A (US20090163788A1-20090625-C00002.png) 1974-06-01

Similar Documents

Publication Publication Date Title
JPS4915114A (US20090163788A1-20090625-C00002.png)
JPS529367B2 (US20090163788A1-20090625-C00002.png)
JPS5639052B2 (US20090163788A1-20090625-C00002.png)
JPS4956588A (US20090163788A1-20090625-C00002.png)
JPS5536368B2 (US20090163788A1-20090625-C00002.png)
CS153323B1 (US20090163788A1-20090625-C00002.png)
CS153922B1 (US20090163788A1-20090625-C00002.png)
JPS48101880A (US20090163788A1-20090625-C00002.png)
NL7215130A (US20090163788A1-20090625-C00002.png)
AU480987A (US20090163788A1-20090625-C00002.png)
CH123172A4 (US20090163788A1-20090625-C00002.png)
CH1470373A4 (US20090163788A1-20090625-C00002.png)
CH545565A (US20090163788A1-20090625-C00002.png)
CH559637A5 (US20090163788A1-20090625-C00002.png)
CH561314A5 (US20090163788A1-20090625-C00002.png)
CH562045A5 (US20090163788A1-20090625-C00002.png)
CH563202A5 (US20090163788A1-20090625-C00002.png)
CH563856A5 (US20090163788A1-20090625-C00002.png)
CH563928A5 (US20090163788A1-20090625-C00002.png)
CH565065A5 (US20090163788A1-20090625-C00002.png)
CH565303A5 (US20090163788A1-20090625-C00002.png)
CH565318A5 (US20090163788A1-20090625-C00002.png)
CH565326A5 (US20090163788A1-20090625-C00002.png)
CH565436A5 (US20090163788A1-20090625-C00002.png)
CH565954A5 (US20090163788A1-20090625-C00002.png)