JPS5631297B2 - - Google Patents

Info

Publication number
JPS5631297B2
JPS5631297B2 JP5996573A JP5996573A JPS5631297B2 JP S5631297 B2 JPS5631297 B2 JP S5631297B2 JP 5996573 A JP5996573 A JP 5996573A JP 5996573 A JP5996573 A JP 5996573A JP S5631297 B2 JPS5631297 B2 JP S5631297B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP5996573A
Other versions
JPS509629A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5996573A priority Critical patent/JPS5631297B2/ja
Publication of JPS509629A publication Critical patent/JPS509629A/ja
Publication of JPS5631297B2 publication Critical patent/JPS5631297B2/ja
Application status is Expired legal-status Critical

Links

JP5996573A 1973-05-29 1973-05-29 Expired JPS5631297B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5996573A JPS5631297B2 (en) 1973-05-29 1973-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5996573A JPS5631297B2 (en) 1973-05-29 1973-05-29

Publications (2)

Publication Number Publication Date
JPS509629A JPS509629A (en) 1975-01-31
JPS5631297B2 true JPS5631297B2 (en) 1981-07-20

Family

ID=13128377

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5996573A Expired JPS5631297B2 (en) 1973-05-29 1973-05-29

Country Status (1)

Country Link
JP (1) JPS5631297B2 (en)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4400409A (en) * 1980-05-19 1983-08-23 Energy Conversion Devices, Inc. Method of making p-doped silicon films
JPS6237528B2 (en) * 1981-04-15 1987-08-13 Shunpei Yamazaki
JPS583223A (en) * 1981-06-30 1983-01-10 Toshiba Corp Manufacture of semiconductor device
JPS5825225A (en) * 1981-08-07 1983-02-15 Mitsubishi Electric Corp Hot wall type decompression unit
JPS5958820A (en) * 1982-09-28 1984-04-04 Matsushita Electronics Corp Equipment for vapor phase epitaxial growth
JPS6010681A (en) * 1983-06-30 1985-01-19 Canon Inc Device for manufacturing photoelectric converting member
JPS61294811A (en) * 1985-06-21 1986-12-25 Nippon Telegr & Teleph Corp <Ntt> Semiconductor crystal manufacturing equipment
JPS6366923A (en) * 1987-03-20 1988-03-25 Shunpei Yamazaki Continuous type semiconductor film forming device
JPS6366922A (en) * 1987-03-20 1988-03-25 Shunpei Yamazaki Manufcture of semiconductor device
JPH05121339A (en) * 1992-03-26 1993-05-18 Semiconductor Energy Lab Co Ltd Apparatus for forming coating film

Also Published As

Publication number Publication date
JPS509629A (en) 1975-01-31

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