JPS5625019B2 - - Google Patents

Info

Publication number
JPS5625019B2
JPS5625019B2 JP9029375A JP9029375A JPS5625019B2 JP S5625019 B2 JPS5625019 B2 JP S5625019B2 JP 9029375 A JP9029375 A JP 9029375A JP 9029375 A JP9029375 A JP 9029375A JP S5625019 B2 JPS5625019 B2 JP S5625019B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9029375A
Other languages
Japanese (ja)
Other versions
JPS5214366A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50090293A priority Critical patent/JPS5214366A/ja
Publication of JPS5214366A publication Critical patent/JPS5214366A/ja
Publication of JPS5625019B2 publication Critical patent/JPS5625019B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Element Separation (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP50090293A 1975-07-25 1975-07-25 Process for production of semiconductor device Granted JPS5214366A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50090293A JPS5214366A (en) 1975-07-25 1975-07-25 Process for production of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50090293A JPS5214366A (en) 1975-07-25 1975-07-25 Process for production of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5214366A JPS5214366A (en) 1977-02-03
JPS5625019B2 true JPS5625019B2 (US07321065-20080122-C00160.png) 1981-06-10

Family

ID=13994473

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50090293A Granted JPS5214366A (en) 1975-07-25 1975-07-25 Process for production of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5214366A (US07321065-20080122-C00160.png)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5897848A (ja) * 1981-12-08 1983-06-10 Seiko Instr & Electronics Ltd 表面平滑化方法
JPS59175745A (ja) * 1983-03-26 1984-10-04 Mitsubishi Electric Corp 半導体装置の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4883788A (US07321065-20080122-C00160.png) * 1972-02-09 1973-11-08
JPS4933572A (US07321065-20080122-C00160.png) * 1972-07-26 1974-03-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4883788A (US07321065-20080122-C00160.png) * 1972-02-09 1973-11-08
JPS4933572A (US07321065-20080122-C00160.png) * 1972-07-26 1974-03-28

Also Published As

Publication number Publication date
JPS5214366A (en) 1977-02-03

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