JPS5624387B2 - - Google Patents
Info
- Publication number
- JPS5624387B2 JPS5624387B2 JP11360173A JP11360173A JPS5624387B2 JP S5624387 B2 JPS5624387 B2 JP S5624387B2 JP 11360173 A JP11360173 A JP 11360173A JP 11360173 A JP11360173 A JP 11360173A JP S5624387 B2 JPS5624387 B2 JP S5624387B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/0061—Electrical connection means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L19/00—Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- G01L19/14—Housings
- G01L19/147—Details about the mounting of the sensor to support or covering means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
- G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
- G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
- G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11360173A JPS5624387B2 (US08087162-20120103-C00010.png) | 1973-10-09 | 1973-10-09 | |
| US05/513,301 US3968466A (en) | 1973-10-09 | 1974-10-09 | Pressure transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11360173A JPS5624387B2 (US08087162-20120103-C00010.png) | 1973-10-09 | 1973-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5082987A JPS5082987A (US08087162-20120103-C00010.png) | 1975-07-04 |
| JPS5624387B2 true JPS5624387B2 (US08087162-20120103-C00010.png) | 1981-06-05 |
Family
ID=14616334
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11360173A Expired JPS5624387B2 (US08087162-20120103-C00010.png) | 1973-10-09 | 1973-10-09 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US3968466A (US08087162-20120103-C00010.png) |
| JP (1) | JPS5624387B2 (US08087162-20120103-C00010.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2017056673A1 (ja) * | 2015-09-30 | 2018-02-22 | 日立オートモティブシステムズ株式会社 | 力学量測定装置 |
Families Citing this family (22)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51120687A (en) * | 1975-04-16 | 1976-10-22 | Hitachi Ltd | Semiconductor pressure converter |
| US4035823A (en) * | 1975-10-06 | 1977-07-12 | Honeywell Inc. | Stress sensor apparatus |
| US4071838A (en) * | 1976-02-09 | 1978-01-31 | Diax Corporation | Solid state force transducer and method of making same |
| US4050049A (en) * | 1976-02-09 | 1977-09-20 | Signetics Corporation | Solid state force transducer, support and method of making same |
| US4133100A (en) * | 1976-12-27 | 1979-01-09 | Myhre Kjell E | Method of making diaphragm of optimized stress and strain distribution |
| JPS5544786A (en) * | 1978-09-27 | 1980-03-29 | Hitachi Ltd | Pressure sensor |
| JPS55112864U (US08087162-20120103-C00010.png) * | 1979-02-02 | 1980-08-08 | ||
| US4317126A (en) * | 1980-04-14 | 1982-02-23 | Motorola, Inc. | Silicon pressure sensor |
| US4400681A (en) * | 1981-02-23 | 1983-08-23 | General Motors Corporation | Semiconductor pressure sensor with slanted resistors |
| US4411158A (en) * | 1981-04-14 | 1983-10-25 | Ametek, Inc. | Apparatus for sensing the condition of a fluid |
| US4416156A (en) * | 1981-12-23 | 1983-11-22 | Honeywell Inc. | High pressure electrical feedthru |
| US4481497A (en) * | 1982-10-27 | 1984-11-06 | Kulite Semiconductor Products, Inc. | Transducer structures employing ceramic substrates and diaphragms |
| US4522072A (en) * | 1983-04-22 | 1985-06-11 | Insouth Microsystems, Inc. | Electromechanical transducer strain sensor arrangement and construction |
| US4554927A (en) * | 1983-08-30 | 1985-11-26 | Thermometrics Inc. | Pressure and temperature sensor |
| DE8407322U1 (de) * | 1984-03-09 | 1984-05-30 | Keller, Hans W., Dipl.-Phys. ETH, 8404 Winterthur | Piezoresestive druckmesszelle |
| JPS6341080A (ja) * | 1986-08-06 | 1988-02-22 | Nissan Motor Co Ltd | 半導体加速度センサ |
| US4889590A (en) * | 1989-04-27 | 1989-12-26 | Motorola Inc. | Semiconductor pressure sensor means and method |
| US6635910B1 (en) | 1999-07-22 | 2003-10-21 | Measurement Specialties, Inc. | Silicon strain gage having a thin layer of highly conductive silicon |
| US7231832B2 (en) * | 2004-09-13 | 2007-06-19 | United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | System and method for detecting cracks and their location |
| US8308433B2 (en) * | 2010-09-30 | 2012-11-13 | General Electric Company | System and method for controlling wind turbine blades |
| US9117821B2 (en) * | 2013-03-12 | 2015-08-25 | Carnegie Mellon University | Oriented crystal nanowire interconnects |
| US20190234820A1 (en) * | 2018-01-29 | 2019-08-01 | Nxp Usa, Inc. | Piezoresistive transducer with jfet-based bridge circuit |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3654579A (en) * | 1970-05-11 | 1972-04-04 | Kulite Semiconductor Products | Electromechanical transducers and housings |
| US3739315A (en) * | 1972-05-18 | 1973-06-12 | Kulite Semiconductors Prod Inc | Semiconductor transducers having h shaped cross-sectional configurations |
| US3764950A (en) * | 1972-07-17 | 1973-10-09 | Fairchild Camera Instr Co | Methods for making semiconductor pressure transducers and the resulting structures |
-
1973
- 1973-10-09 JP JP11360173A patent/JPS5624387B2/ja not_active Expired
-
1974
- 1974-10-09 US US05/513,301 patent/US3968466A/en not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPWO2017056673A1 (ja) * | 2015-09-30 | 2018-02-22 | 日立オートモティブシステムズ株式会社 | 力学量測定装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| US3968466A (en) | 1976-07-06 |
| JPS5082987A (US08087162-20120103-C00010.png) | 1975-07-04 |
