JPS5619928B2 - - Google Patents

Info

Publication number
JPS5619928B2
JPS5619928B2 JP13695375A JP13695375A JPS5619928B2 JP S5619928 B2 JPS5619928 B2 JP S5619928B2 JP 13695375 A JP13695375 A JP 13695375A JP 13695375 A JP13695375 A JP 13695375A JP S5619928 B2 JPS5619928 B2 JP S5619928B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13695375A
Other languages
Japanese (ja)
Other versions
JPS5260989A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP50136953A priority Critical patent/JPS5260989A/ja
Publication of JPS5260989A publication Critical patent/JPS5260989A/ja
Publication of JPS5619928B2 publication Critical patent/JPS5619928B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Inorganic Compounds Of Heavy Metals (AREA)
  • Compositions Of Oxide Ceramics (AREA)
  • Physical Vapour Deposition (AREA)
  • Inorganic Insulating Materials (AREA)
  • Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP50136953A 1975-11-13 1975-11-13 Manufacturing of dielectric thin film Granted JPS5260989A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP50136953A JPS5260989A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50136953A JPS5260989A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Publications (2)

Publication Number Publication Date
JPS5260989A JPS5260989A (en) 1977-05-19
JPS5619928B2 true JPS5619928B2 (enrdf_load_stackoverflow) 1981-05-11

Family

ID=15187356

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50136953A Granted JPS5260989A (en) 1975-11-13 1975-11-13 Manufacturing of dielectric thin film

Country Status (1)

Country Link
JP (1) JPS5260989A (enrdf_load_stackoverflow)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6217099A (ja) * 1985-07-16 1987-01-26 Kokusai Denshin Denwa Co Ltd <Kdd> ビスマス含有酸化物単結晶の製造方法
JPH068509B2 (ja) * 1985-09-17 1994-02-02 勝 岡田 強誘電体薄膜の製造方法
JPS6447851A (en) * 1987-08-18 1989-02-22 Canon Kk Formation of thin bismuth-titanate film
KR100723399B1 (ko) 2002-08-06 2007-05-30 삼성전자주식회사 비스무트 티타늄 실리콘 산화물, 비스무트 티타늄 실리콘산화물 박막 및 그 제조방법

Also Published As

Publication number Publication date
JPS5260989A (en) 1977-05-19

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