JPS5617034A - Semiconductor device and manufacture thereof - Google Patents

Semiconductor device and manufacture thereof

Info

Publication number
JPS5617034A
JPS5617034A JP9159979A JP9159979A JPS5617034A JP S5617034 A JPS5617034 A JP S5617034A JP 9159979 A JP9159979 A JP 9159979A JP 9159979 A JP9159979 A JP 9159979A JP S5617034 A JPS5617034 A JP S5617034A
Authority
JP
Japan
Prior art keywords
film
base
thereonto
implanted
ion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9159979A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6228588B2 (enrdf_load_stackoverflow
Inventor
Yunosuke Kawabe
Yoshinobu Monma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP9159979A priority Critical patent/JPS5617034A/ja
Publication of JPS5617034A publication Critical patent/JPS5617034A/ja
Publication of JPS6228588B2 publication Critical patent/JPS6228588B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Bipolar Transistors (AREA)
JP9159979A 1979-07-20 1979-07-20 Semiconductor device and manufacture thereof Granted JPS5617034A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9159979A JPS5617034A (en) 1979-07-20 1979-07-20 Semiconductor device and manufacture thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9159979A JPS5617034A (en) 1979-07-20 1979-07-20 Semiconductor device and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS5617034A true JPS5617034A (en) 1981-02-18
JPS6228588B2 JPS6228588B2 (enrdf_load_stackoverflow) 1987-06-22

Family

ID=14031013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9159979A Granted JPS5617034A (en) 1979-07-20 1979-07-20 Semiconductor device and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS5617034A (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547879A (en) * 1977-06-20 1979-01-20 Nec Corp Manufacture for semiconductor device

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS547879A (en) * 1977-06-20 1979-01-20 Nec Corp Manufacture for semiconductor device

Also Published As

Publication number Publication date
JPS6228588B2 (enrdf_load_stackoverflow) 1987-06-22

Similar Documents

Publication Publication Date Title
US3455020A (en) Method of fabricating insulated-gate field-effect devices
JPS5635459A (en) Semiconductor memory device and manufacture thereof
JPS5688354A (en) Semiconductor integrated circuit device
JPS5617034A (en) Semiconductor device and manufacture thereof
JPS5642366A (en) Manufacture of semiconductor device
JPS54141585A (en) Semiconductor integrated circuit device
JPS5629344A (en) Semiconductor integrated circuit device and manufacture thereof
JPS57128957A (en) Semiconductor integrated circuit device and manufacture thereof
JPS5642373A (en) Manufacture of semiconductor device
JPS5648174A (en) Semiconductor device and its preparation
JPS5591872A (en) Manufacture of semiconductor device
JPS56111240A (en) Semiconductor device and manufacture thereof
JPS5630768A (en) Manufacture of mnos type semiconductor device
JPS5717129A (en) Manufacture of semiconductor device
JPS5629361A (en) Manufacture of semiconductor integrated circuit
JPS5591873A (en) Manufacture of semiconductor device
JPS5539611A (en) Manufacturing semiconductor device
JPS56134762A (en) Manufacturing of bipolar semiconductor device
JPS5627971A (en) Semiconductor device and manufacture thereof
JPS5759321A (en) Manufacture of semiconductor device
JPS5756967A (en) Manufacture of semiconductor device
JPS5562760A (en) Semiconductor device
JPS5670645A (en) Manufacture of semiconductor device
JPS562651A (en) Manufacture of semiconductor device
JPS56130971A (en) Manufacture of mos type semiconductor device