JPS56164552U - - Google Patents
Info
- Publication number
- JPS56164552U JPS56164552U JP6402980U JP6402980U JPS56164552U JP S56164552 U JPS56164552 U JP S56164552U JP 6402980 U JP6402980 U JP 6402980U JP 6402980 U JP6402980 U JP 6402980U JP S56164552 U JPS56164552 U JP S56164552U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980064029U JPS6138183Y2 (cs) | 1980-05-10 | 1980-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1980064029U JPS6138183Y2 (cs) | 1980-05-10 | 1980-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56164552U true JPS56164552U (cs) | 1981-12-07 |
| JPS6138183Y2 JPS6138183Y2 (cs) | 1986-11-05 |
Family
ID=29658227
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1980064029U Expired JPS6138183Y2 (cs) | 1980-05-10 | 1980-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6138183Y2 (cs) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5160448A (cs) * | 1974-11-22 | 1976-05-26 | Hitachi Ltd | |
| JPS5351976A (en) * | 1976-10-22 | 1978-05-11 | Hitachi Ltd | Wafer feeder |
-
1980
- 1980-05-10 JP JP1980064029U patent/JPS6138183Y2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5160448A (cs) * | 1974-11-22 | 1976-05-26 | Hitachi Ltd | |
| JPS5351976A (en) * | 1976-10-22 | 1978-05-11 | Hitachi Ltd | Wafer feeder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6138183Y2 (cs) | 1986-11-05 |