JPS56129660A - High density hafnium oxide sintered body and manufacture - Google Patents

High density hafnium oxide sintered body and manufacture

Info

Publication number
JPS56129660A
JPS56129660A JP3272480A JP3272480A JPS56129660A JP S56129660 A JPS56129660 A JP S56129660A JP 3272480 A JP3272480 A JP 3272480A JP 3272480 A JP3272480 A JP 3272480A JP S56129660 A JPS56129660 A JP S56129660A
Authority
JP
Japan
Prior art keywords
manufacture
high density
sintered body
hafnium oxide
oxide sintered
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3272480A
Other languages
Japanese (ja)
Other versions
JPS61302B2 (en
Inventor
Hiroyuki Yoshida
Noboru Igarashi
Jiyunya Yamano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Coorstek KK
Original Assignee
Toshiba Ceramics Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Ceramics Co Ltd filed Critical Toshiba Ceramics Co Ltd
Priority to JP3272480A priority Critical patent/JPS56129660A/en
Publication of JPS56129660A publication Critical patent/JPS56129660A/en
Publication of JPS61302B2 publication Critical patent/JPS61302B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compositions Of Oxide Ceramics (AREA)
JP3272480A 1980-03-17 1980-03-17 High density hafnium oxide sintered body and manufacture Granted JPS56129660A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3272480A JPS56129660A (en) 1980-03-17 1980-03-17 High density hafnium oxide sintered body and manufacture

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3272480A JPS56129660A (en) 1980-03-17 1980-03-17 High density hafnium oxide sintered body and manufacture

Publications (2)

Publication Number Publication Date
JPS56129660A true JPS56129660A (en) 1981-10-09
JPS61302B2 JPS61302B2 (en) 1986-01-07

Family

ID=12366783

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3272480A Granted JPS56129660A (en) 1980-03-17 1980-03-17 High density hafnium oxide sintered body and manufacture

Country Status (1)

Country Link
JP (1) JPS56129660A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109369180A (en) * 2018-12-11 2019-02-22 有研工程技术研究院有限公司 A kind of high density HfO2The preparation method of target

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109369180A (en) * 2018-12-11 2019-02-22 有研工程技术研究院有限公司 A kind of high density HfO2The preparation method of target

Also Published As

Publication number Publication date
JPS61302B2 (en) 1986-01-07

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