JPS56129660A - High density hafnium oxide sintered body and manufacture - Google Patents
High density hafnium oxide sintered body and manufactureInfo
- Publication number
- JPS56129660A JPS56129660A JP3272480A JP3272480A JPS56129660A JP S56129660 A JPS56129660 A JP S56129660A JP 3272480 A JP3272480 A JP 3272480A JP 3272480 A JP3272480 A JP 3272480A JP S56129660 A JPS56129660 A JP S56129660A
- Authority
- JP
- Japan
- Prior art keywords
- manufacture
- high density
- sintered body
- hafnium oxide
- oxide sintered
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Compositions Of Oxide Ceramics (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3272480A JPS56129660A (en) | 1980-03-17 | 1980-03-17 | High density hafnium oxide sintered body and manufacture |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3272480A JPS56129660A (en) | 1980-03-17 | 1980-03-17 | High density hafnium oxide sintered body and manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS56129660A true JPS56129660A (en) | 1981-10-09 |
JPS61302B2 JPS61302B2 (en) | 1986-01-07 |
Family
ID=12366783
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3272480A Granted JPS56129660A (en) | 1980-03-17 | 1980-03-17 | High density hafnium oxide sintered body and manufacture |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56129660A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109369180A (en) * | 2018-12-11 | 2019-02-22 | 有研工程技术研究院有限公司 | A kind of high density HfO2The preparation method of target |
-
1980
- 1980-03-17 JP JP3272480A patent/JPS56129660A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN109369180A (en) * | 2018-12-11 | 2019-02-22 | 有研工程技术研究院有限公司 | A kind of high density HfO2The preparation method of target |
Also Published As
Publication number | Publication date |
---|---|
JPS61302B2 (en) | 1986-01-07 |
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