JPS5596557U - - Google Patents
Info
- Publication number
- JPS5596557U JPS5596557U JP17910378U JP17910378U JPS5596557U JP S5596557 U JPS5596557 U JP S5596557U JP 17910378 U JP17910378 U JP 17910378U JP 17910378 U JP17910378 U JP 17910378U JP S5596557 U JPS5596557 U JP S5596557U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
- Electron Sources, Ion Sources (AREA)
- Electron Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17910378U JPS5596557U (cs) | 1978-12-27 | 1978-12-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17910378U JPS5596557U (cs) | 1978-12-27 | 1978-12-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5596557U true JPS5596557U (cs) | 1980-07-04 |
Family
ID=29190207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17910378U Pending JPS5596557U (cs) | 1978-12-27 | 1978-12-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5596557U (cs) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5953756U (ja) * | 1982-09-30 | 1984-04-09 | 株式会社島津製作所 | 電子プロ−ブ等のプロ−ブ電流設定装置 |
| JP2002050314A (ja) * | 2000-08-01 | 2002-02-15 | Hitachi Ltd | 荷電粒子線装置 |
-
1978
- 1978-12-27 JP JP17910378U patent/JPS5596557U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5953756U (ja) * | 1982-09-30 | 1984-04-09 | 株式会社島津製作所 | 電子プロ−ブ等のプロ−ブ電流設定装置 |
| JP2002050314A (ja) * | 2000-08-01 | 2002-02-15 | Hitachi Ltd | 荷電粒子線装置 |