JPS5595318A - Production of amorphous film - Google Patents
Production of amorphous filmInfo
- Publication number
- JPS5595318A JPS5595318A JP226179A JP226179A JPS5595318A JP S5595318 A JPS5595318 A JP S5595318A JP 226179 A JP226179 A JP 226179A JP 226179 A JP226179 A JP 226179A JP S5595318 A JPS5595318 A JP S5595318A
- Authority
- JP
- Japan
- Prior art keywords
- gas
- iiiwv
- amorphous film
- group compound
- mixed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Led Devices (AREA)
- Light Receiving Elements (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Photovoltaic Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP226179A JPS5595318A (en) | 1979-01-16 | 1979-01-16 | Production of amorphous film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP226179A JPS5595318A (en) | 1979-01-16 | 1979-01-16 | Production of amorphous film |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5595318A true JPS5595318A (en) | 1980-07-19 |
JPS5636565B2 JPS5636565B2 (ja) | 1981-08-25 |
Family
ID=11524416
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP226179A Granted JPS5595318A (en) | 1979-01-16 | 1979-01-16 | Production of amorphous film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5595318A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60216535A (ja) * | 1984-03-08 | 1985-10-30 | Toshikazu Suda | 2−5族化合物半導体の製造方法 |
US5320984A (en) * | 1990-12-21 | 1994-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming a semiconductor film by sputter deposition in a hydrogen atmosphere |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5913734U (ja) * | 1982-07-19 | 1984-01-27 | いすゞ自動車株式会社 | パ−キング・ブレ−キを兼ねたデイスク・ブレ−キ装置 |
-
1979
- 1979-01-16 JP JP226179A patent/JPS5595318A/ja active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60216535A (ja) * | 1984-03-08 | 1985-10-30 | Toshikazu Suda | 2−5族化合物半導体の製造方法 |
US5320984A (en) * | 1990-12-21 | 1994-06-14 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming a semiconductor film by sputter deposition in a hydrogen atmosphere |
Also Published As
Publication number | Publication date |
---|---|
JPS5636565B2 (ja) | 1981-08-25 |
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