JPS5594043U - - Google Patents
Info
- Publication number
- JPS5594043U JPS5594043U JP17623778U JP17623778U JPS5594043U JP S5594043 U JPS5594043 U JP S5594043U JP 17623778 U JP17623778 U JP 17623778U JP 17623778 U JP17623778 U JP 17623778U JP S5594043 U JPS5594043 U JP S5594043U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17623778U JPS5594043U (ja) | 1978-12-21 | 1978-12-21 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17623778U JPS5594043U (ja) | 1978-12-21 | 1978-12-21 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5594043U true JPS5594043U (ja) | 1980-06-30 |
Family
ID=29184575
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17623778U Pending JPS5594043U (ja) | 1978-12-21 | 1978-12-21 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5594043U (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60163436A (ja) * | 1984-02-06 | 1985-08-26 | Seiichiro Sogo | 半導体材料の洗浄乾燥方法 |
JPH03263831A (ja) * | 1990-03-14 | 1991-11-25 | Dan Clean Prod:Kk | スプレー洗浄装置 |
-
1978
- 1978-12-21 JP JP17623778U patent/JPS5594043U/ja active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60163436A (ja) * | 1984-02-06 | 1985-08-26 | Seiichiro Sogo | 半導体材料の洗浄乾燥方法 |
JPH03263831A (ja) * | 1990-03-14 | 1991-11-25 | Dan Clean Prod:Kk | スプレー洗浄装置 |