JPS5587144A - Resist image printing method - Google Patents

Resist image printing method

Info

Publication number
JPS5587144A
JPS5587144A JP15930278A JP15930278A JPS5587144A JP S5587144 A JPS5587144 A JP S5587144A JP 15930278 A JP15930278 A JP 15930278A JP 15930278 A JP15930278 A JP 15930278A JP S5587144 A JPS5587144 A JP S5587144A
Authority
JP
Japan
Prior art keywords
beams
resist image
substrate
laser
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15930278A
Other languages
Japanese (ja)
Inventor
Hisashi Nakane
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Ohka Kogyo Co Ltd
Original Assignee
Tokyo Ohka Kogyo Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Ohka Kogyo Co Ltd filed Critical Tokyo Ohka Kogyo Co Ltd
Priority to JP15930278A priority Critical patent/JPS5587144A/en
Publication of JPS5587144A publication Critical patent/JPS5587144A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To easily print a fine pattern resist image on a photoresist on a substrate without bringing a mask into contact with the substrate by using parllel laser beams.
CONSTITUTION: The laser beams are emitted from light souce 1, passed through hole 7 of parabolic mirror 3, and diffusion reflected by reflection sphere 4 (fixed in the focus of mirror 3) to give parallel beams 2. These beams 2 are transmitted through mask 5, radiated to the photoresist on substrate 6, and this resist is developed to form a resist image. It is desirable that He-Cd laser releasing about 400W 300nm wavelength light or modulalble dye laser is used for the above laser beams.
COPYRIGHT: (C)1980,JPO&Japio
JP15930278A 1978-12-26 1978-12-26 Resist image printing method Pending JPS5587144A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15930278A JPS5587144A (en) 1978-12-26 1978-12-26 Resist image printing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15930278A JPS5587144A (en) 1978-12-26 1978-12-26 Resist image printing method

Publications (1)

Publication Number Publication Date
JPS5587144A true JPS5587144A (en) 1980-07-01

Family

ID=15690822

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15930278A Pending JPS5587144A (en) 1978-12-26 1978-12-26 Resist image printing method

Country Status (1)

Country Link
JP (1) JPS5587144A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739858A (en) * 1991-05-02 1998-04-14 Canon Kabushiki Kaisha Automatic focusing device using a plurality of different frequency components extracted at the same point

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5739858A (en) * 1991-05-02 1998-04-14 Canon Kabushiki Kaisha Automatic focusing device using a plurality of different frequency components extracted at the same point

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