JPS5583233A - Electron beam scanning method for mark detection - Google Patents

Electron beam scanning method for mark detection

Info

Publication number
JPS5583233A
JPS5583233A JP15891378A JP15891378A JPS5583233A JP S5583233 A JPS5583233 A JP S5583233A JP 15891378 A JP15891378 A JP 15891378A JP 15891378 A JP15891378 A JP 15891378A JP S5583233 A JPS5583233 A JP S5583233A
Authority
JP
Japan
Prior art keywords
mark
scanning
constant
increased
detection
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15891378A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6258140B2 (zh
Inventor
Junichi Kai
Nobuyuki Yasutake
Toru Funayama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP15891378A priority Critical patent/JPS5583233A/ja
Publication of JPS5583233A publication Critical patent/JPS5583233A/ja
Publication of JPS6258140B2 publication Critical patent/JPS6258140B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
JP15891378A 1978-12-20 1978-12-20 Electron beam scanning method for mark detection Granted JPS5583233A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15891378A JPS5583233A (en) 1978-12-20 1978-12-20 Electron beam scanning method for mark detection

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15891378A JPS5583233A (en) 1978-12-20 1978-12-20 Electron beam scanning method for mark detection

Publications (2)

Publication Number Publication Date
JPS5583233A true JPS5583233A (en) 1980-06-23
JPS6258140B2 JPS6258140B2 (zh) 1987-12-04

Family

ID=15682076

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15891378A Granted JPS5583233A (en) 1978-12-20 1978-12-20 Electron beam scanning method for mark detection

Country Status (1)

Country Link
JP (1) JPS5583233A (zh)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870554U (ja) * 1981-11-09 1983-05-13 トヨタ自動車株式会社 ダンパプ−リ
JPS58102524A (ja) * 1981-12-14 1983-06-18 Fujitsu Ltd 電子ビ−ム露光装置の位置合せ方法
JPS58151041A (ja) * 1982-03-03 1983-09-08 Toshiba Corp リダンダンシ−装置
JPS61210625A (ja) * 1985-03-15 1986-09-18 Toshiba Corp 電子ビ−ム描画方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5870554U (ja) * 1981-11-09 1983-05-13 トヨタ自動車株式会社 ダンパプ−リ
JPS58102524A (ja) * 1981-12-14 1983-06-18 Fujitsu Ltd 電子ビ−ム露光装置の位置合せ方法
JPS58151041A (ja) * 1982-03-03 1983-09-08 Toshiba Corp リダンダンシ−装置
JPS61210625A (ja) * 1985-03-15 1986-09-18 Toshiba Corp 電子ビ−ム描画方法

Also Published As

Publication number Publication date
JPS6258140B2 (zh) 1987-12-04

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