JPS5567597A - Single crystal rod producing device - Google Patents
Single crystal rod producing deviceInfo
- Publication number
- JPS5567597A JPS5567597A JP13734678A JP13734678A JPS5567597A JP S5567597 A JPS5567597 A JP S5567597A JP 13734678 A JP13734678 A JP 13734678A JP 13734678 A JP13734678 A JP 13734678A JP S5567597 A JPS5567597 A JP S5567597A
- Authority
- JP
- Japan
- Prior art keywords
- melt
- single crystal
- crystal rod
- crucible
- high temp
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE: To grow a single crystal rod of a low impurity concn. by placing a shielding body for interrupting gas movement between a high temp. portion consisting of a crucible receiving stand, a heating element, a heat insulator, etc. arranged around a crucible and the surface of a crystal melt and by setting a specified gas strainer over the melt to control mixing of impurities into the melt.
CONSTITUTION: The surface of Si melt 23 in crucible 22 which is rotated or vertically moved by support stand 41 is separated from a high temp. portion of carbon products such as heating element 25, heat insulator 26, etc. with a shielding body consisting of heat insulating ring 33 and cap 34. Ar introduced from gas inlet 38 is exhausted from exhaust port 39 while protecting element 25 and insulator 26. On the other hand, a little Ar flowing along single crystal rod 32 from inlet 28 is reduced in press. on the melt surface with inverted umbrella-shape gas strainer 35 set over melt 23, so it is exhausted from exhaust port 36 without forming a swirl. Accordingly, C, etc. evaporated from the high temp. portion are prevented from mixing into melt 23, and low carbon single crystal rod 32 is obtd.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13734678A JPS5567597A (en) | 1978-11-09 | 1978-11-09 | Single crystal rod producing device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13734678A JPS5567597A (en) | 1978-11-09 | 1978-11-09 | Single crystal rod producing device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5567597A true JPS5567597A (en) | 1980-05-21 |
JPS5621758B2 JPS5621758B2 (en) | 1981-05-21 |
Family
ID=15196486
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13734678A Granted JPS5567597A (en) | 1978-11-09 | 1978-11-09 | Single crystal rod producing device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5567597A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH071072U (en) * | 1994-04-28 | 1995-01-10 | 三菱マテリアル株式会社 | Single crystal pulling device |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6139326Y2 (en) * | 1981-04-09 | 1986-11-11 |
-
1978
- 1978-11-09 JP JP13734678A patent/JPS5567597A/en active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH071072U (en) * | 1994-04-28 | 1995-01-10 | 三菱マテリアル株式会社 | Single crystal pulling device |
Also Published As
Publication number | Publication date |
---|---|
JPS5621758B2 (en) | 1981-05-21 |
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