JPS5567597A - Single crystal rod producing device - Google Patents

Single crystal rod producing device

Info

Publication number
JPS5567597A
JPS5567597A JP13734678A JP13734678A JPS5567597A JP S5567597 A JPS5567597 A JP S5567597A JP 13734678 A JP13734678 A JP 13734678A JP 13734678 A JP13734678 A JP 13734678A JP S5567597 A JPS5567597 A JP S5567597A
Authority
JP
Japan
Prior art keywords
melt
single crystal
crystal rod
crucible
high temp
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13734678A
Other languages
Japanese (ja)
Other versions
JPS5621758B2 (en
Inventor
Shinichiro Takasu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
CHO LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI, CHO LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP13734678A priority Critical patent/JPS5567597A/en
Publication of JPS5567597A publication Critical patent/JPS5567597A/en
Publication of JPS5621758B2 publication Critical patent/JPS5621758B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE: To grow a single crystal rod of a low impurity concn. by placing a shielding body for interrupting gas movement between a high temp. portion consisting of a crucible receiving stand, a heating element, a heat insulator, etc. arranged around a crucible and the surface of a crystal melt and by setting a specified gas strainer over the melt to control mixing of impurities into the melt.
CONSTITUTION: The surface of Si melt 23 in crucible 22 which is rotated or vertically moved by support stand 41 is separated from a high temp. portion of carbon products such as heating element 25, heat insulator 26, etc. with a shielding body consisting of heat insulating ring 33 and cap 34. Ar introduced from gas inlet 38 is exhausted from exhaust port 39 while protecting element 25 and insulator 26. On the other hand, a little Ar flowing along single crystal rod 32 from inlet 28 is reduced in press. on the melt surface with inverted umbrella-shape gas strainer 35 set over melt 23, so it is exhausted from exhaust port 36 without forming a swirl. Accordingly, C, etc. evaporated from the high temp. portion are prevented from mixing into melt 23, and low carbon single crystal rod 32 is obtd.
COPYRIGHT: (C)1980,JPO&Japio
JP13734678A 1978-11-09 1978-11-09 Single crystal rod producing device Granted JPS5567597A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13734678A JPS5567597A (en) 1978-11-09 1978-11-09 Single crystal rod producing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13734678A JPS5567597A (en) 1978-11-09 1978-11-09 Single crystal rod producing device

Publications (2)

Publication Number Publication Date
JPS5567597A true JPS5567597A (en) 1980-05-21
JPS5621758B2 JPS5621758B2 (en) 1981-05-21

Family

ID=15196486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13734678A Granted JPS5567597A (en) 1978-11-09 1978-11-09 Single crystal rod producing device

Country Status (1)

Country Link
JP (1) JPS5567597A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071072U (en) * 1994-04-28 1995-01-10 三菱マテリアル株式会社 Single crystal pulling device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6139326Y2 (en) * 1981-04-09 1986-11-11

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH071072U (en) * 1994-04-28 1995-01-10 三菱マテリアル株式会社 Single crystal pulling device

Also Published As

Publication number Publication date
JPS5621758B2 (en) 1981-05-21

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