JPS555694B2 - - Google Patents

Info

Publication number
JPS555694B2
JPS555694B2 JP9615672A JP9615672A JPS555694B2 JP S555694 B2 JPS555694 B2 JP S555694B2 JP 9615672 A JP9615672 A JP 9615672A JP 9615672 A JP9615672 A JP 9615672A JP S555694 B2 JPS555694 B2 JP S555694B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9615672A
Other languages
Japanese (ja)
Other versions
JPS4953763A (US20100223739A1-20100909-C00005.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9615672A priority Critical patent/JPS555694B2/ja
Publication of JPS4953763A publication Critical patent/JPS4953763A/ja
Publication of JPS555694B2 publication Critical patent/JPS555694B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP9615672A 1972-09-27 1972-09-27 Expired JPS555694B2 (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9615672A JPS555694B2 (US20100223739A1-20100909-C00005.png) 1972-09-27 1972-09-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9615672A JPS555694B2 (US20100223739A1-20100909-C00005.png) 1972-09-27 1972-09-27

Publications (2)

Publication Number Publication Date
JPS4953763A JPS4953763A (US20100223739A1-20100909-C00005.png) 1974-05-24
JPS555694B2 true JPS555694B2 (US20100223739A1-20100909-C00005.png) 1980-02-08

Family

ID=14157483

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9615672A Expired JPS555694B2 (US20100223739A1-20100909-C00005.png) 1972-09-27 1972-09-27

Country Status (1)

Country Link
JP (1) JPS555694B2 (US20100223739A1-20100909-C00005.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5694733A (en) * 1979-12-28 1981-07-31 Toshiba Ceramics Co Ltd High purity crystal powder buffer for semiconductor

Also Published As

Publication number Publication date
JPS4953763A (US20100223739A1-20100909-C00005.png) 1974-05-24

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