JPS5555963A - Conveying container - Google Patents
Conveying containerInfo
- Publication number
- JPS5555963A JPS5555963A JP12160478A JP12160478A JPS5555963A JP S5555963 A JPS5555963 A JP S5555963A JP 12160478 A JP12160478 A JP 12160478A JP 12160478 A JP12160478 A JP 12160478A JP S5555963 A JPS5555963 A JP S5555963A
- Authority
- JP
- Japan
- Prior art keywords
- conveying container
- conveying
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12160478A JPS5555963A (en) | 1978-10-04 | 1978-10-04 | Conveying container |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12160478A JPS5555963A (en) | 1978-10-04 | 1978-10-04 | Conveying container |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5555963A true JPS5555963A (en) | 1980-04-24 |
JPS5744552B2 JPS5744552B2 (en) | 1982-09-21 |
Family
ID=14815359
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12160478A Granted JPS5555963A (en) | 1978-10-04 | 1978-10-04 | Conveying container |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5555963A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59187149U (en) * | 1983-05-30 | 1984-12-12 | 日本シリコン株式会社 | Cassette for transporting semiconductor wafers |
WO2007066384A1 (en) * | 2005-12-06 | 2007-06-14 | Fujitsu Limited | Semiconductor wafer storage case and method of storing wafers |
JP2009518837A (en) * | 2005-12-09 | 2009-05-07 | アルカテル−ルーセント | Sealed enclosure for transporting and storing semiconductor substrates |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6258668A (en) * | 1985-09-09 | 1987-03-14 | Omron Tateisi Electronics Co | Semiconductor device |
-
1978
- 1978-10-04 JP JP12160478A patent/JPS5555963A/en active Granted
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59187149U (en) * | 1983-05-30 | 1984-12-12 | 日本シリコン株式会社 | Cassette for transporting semiconductor wafers |
WO2007066384A1 (en) * | 2005-12-06 | 2007-06-14 | Fujitsu Limited | Semiconductor wafer storage case and method of storing wafers |
JPWO2007066384A1 (en) * | 2005-12-06 | 2009-05-14 | 富士通マイクロエレクトロニクス株式会社 | Semiconductor wafer storage case and semiconductor wafer storage method |
US7857140B2 (en) | 2005-12-06 | 2010-12-28 | Fujitsu Semiconductor Limited | Semiconductor wafer storage case and semiconductor wafer storing method |
JP4973501B2 (en) * | 2005-12-06 | 2012-07-11 | 富士通セミコンダクター株式会社 | Semiconductor wafer storage case and semiconductor wafer storage method |
JP2009518837A (en) * | 2005-12-09 | 2009-05-07 | アルカテル−ルーセント | Sealed enclosure for transporting and storing semiconductor substrates |
Also Published As
Publication number | Publication date |
---|---|
JPS5744552B2 (en) | 1982-09-21 |
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