JPS5555963A - Conveying container - Google Patents

Conveying container

Info

Publication number
JPS5555963A
JPS5555963A JP12160478A JP12160478A JPS5555963A JP S5555963 A JPS5555963 A JP S5555963A JP 12160478 A JP12160478 A JP 12160478A JP 12160478 A JP12160478 A JP 12160478A JP S5555963 A JPS5555963 A JP S5555963A
Authority
JP
Japan
Prior art keywords
conveying container
conveying
container
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12160478A
Other languages
Japanese (ja)
Other versions
JPS5744552B2 (en
Inventor
Kintarou Katou
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KATO YOUKI YUUGEN
Original Assignee
KATO YOUKI YUUGEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by KATO YOUKI YUUGEN filed Critical KATO YOUKI YUUGEN
Priority to JP12160478A priority Critical patent/JPS5555963A/en
Publication of JPS5555963A publication Critical patent/JPS5555963A/en
Publication of JPS5744552B2 publication Critical patent/JPS5744552B2/ja
Granted legal-status Critical Current

Links

JP12160478A 1978-10-04 1978-10-04 Conveying container Granted JPS5555963A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12160478A JPS5555963A (en) 1978-10-04 1978-10-04 Conveying container

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12160478A JPS5555963A (en) 1978-10-04 1978-10-04 Conveying container

Publications (2)

Publication Number Publication Date
JPS5555963A true JPS5555963A (en) 1980-04-24
JPS5744552B2 JPS5744552B2 (en) 1982-09-21

Family

ID=14815359

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12160478A Granted JPS5555963A (en) 1978-10-04 1978-10-04 Conveying container

Country Status (1)

Country Link
JP (1) JPS5555963A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187149U (en) * 1983-05-30 1984-12-12 日本シリコン株式会社 Cassette for transporting semiconductor wafers
WO2007066384A1 (en) * 2005-12-06 2007-06-14 Fujitsu Limited Semiconductor wafer storage case and method of storing wafers
JP2009518837A (en) * 2005-12-09 2009-05-07 アルカテル−ルーセント Sealed enclosure for transporting and storing semiconductor substrates

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258668A (en) * 1985-09-09 1987-03-14 Omron Tateisi Electronics Co Semiconductor device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59187149U (en) * 1983-05-30 1984-12-12 日本シリコン株式会社 Cassette for transporting semiconductor wafers
WO2007066384A1 (en) * 2005-12-06 2007-06-14 Fujitsu Limited Semiconductor wafer storage case and method of storing wafers
JPWO2007066384A1 (en) * 2005-12-06 2009-05-14 富士通マイクロエレクトロニクス株式会社 Semiconductor wafer storage case and semiconductor wafer storage method
US7857140B2 (en) 2005-12-06 2010-12-28 Fujitsu Semiconductor Limited Semiconductor wafer storage case and semiconductor wafer storing method
JP4973501B2 (en) * 2005-12-06 2012-07-11 富士通セミコンダクター株式会社 Semiconductor wafer storage case and semiconductor wafer storage method
JP2009518837A (en) * 2005-12-09 2009-05-07 アルカテル−ルーセント Sealed enclosure for transporting and storing semiconductor substrates

Also Published As

Publication number Publication date
JPS5744552B2 (en) 1982-09-21

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