JPS5553431A - Semiconductor element - Google Patents
Semiconductor elementInfo
- Publication number
- JPS5553431A JPS5553431A JP12705178A JP12705178A JPS5553431A JP S5553431 A JPS5553431 A JP S5553431A JP 12705178 A JP12705178 A JP 12705178A JP 12705178 A JP12705178 A JP 12705178A JP S5553431 A JPS5553431 A JP S5553431A
- Authority
- JP
- Japan
- Prior art keywords
- base
- holes
- supporting plate
- tapered
- here
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To eliminate the occurrence of bending strain against a base, by using Si for a supporting plate on which a semiconductor base is fixed via wax, further providing a plurality of tapered holes on the Si supporting plate perpendicular to its surface and burying here tapered metal plugs.
CONSTITUTION: p-type Polycrystalline Si plate having a low resistivity is used as supporting plate 5 for fitting semiconductor base 1. Here, a plurality of holes are made perpendicular to the surface of base 1. Holes 6 are tapered. Wider and narrow openings are alternately directed toward base 1. Further, Al-layer 7 is fitted on the inner wall of holes 6. Next, tapered Mo plugs 8 are buried into holes 6 with the surface of supporting plate 5 maintained flat. On top of this is fixed semiconductor base 1 having a PN junction by using wax 3, and on the surface is fitted electrode 4. By this, the electric characteristics of base 1 are stabilized.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12705178A JPS5553431A (en) | 1978-10-16 | 1978-10-16 | Semiconductor element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP12705178A JPS5553431A (en) | 1978-10-16 | 1978-10-16 | Semiconductor element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5553431A true JPS5553431A (en) | 1980-04-18 |
Family
ID=14950378
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP12705178A Pending JPS5553431A (en) | 1978-10-16 | 1978-10-16 | Semiconductor element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5553431A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4664309A (en) * | 1983-06-30 | 1987-05-12 | Raychem Corporation | Chip mounting device |
US4705205A (en) * | 1983-06-30 | 1987-11-10 | Raychem Corporation | Chip carrier mounting device |
-
1978
- 1978-10-16 JP JP12705178A patent/JPS5553431A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4664309A (en) * | 1983-06-30 | 1987-05-12 | Raychem Corporation | Chip mounting device |
US4705205A (en) * | 1983-06-30 | 1987-11-10 | Raychem Corporation | Chip carrier mounting device |
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