JPS5548693B2 - - Google Patents

Info

Publication number
JPS5548693B2
JPS5548693B2 JP7206873A JP7206873A JPS5548693B2 JP S5548693 B2 JPS5548693 B2 JP S5548693B2 JP 7206873 A JP7206873 A JP 7206873A JP 7206873 A JP7206873 A JP 7206873A JP S5548693 B2 JPS5548693 B2 JP S5548693B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP7206873A
Other languages
Japanese (ja)
Other versions
JPS5022577A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7206873A priority Critical patent/JPS5548693B2/ja
Publication of JPS5022577A publication Critical patent/JPS5022577A/ja
Publication of JPS5548693B2 publication Critical patent/JPS5548693B2/ja
Expired legal-status Critical Current

Links

JP7206873A 1973-06-26 1973-06-26 Expired JPS5548693B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7206873A JPS5548693B2 (en) 1973-06-26 1973-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7206873A JPS5548693B2 (en) 1973-06-26 1973-06-26

Publications (2)

Publication Number Publication Date
JPS5022577A JPS5022577A (en) 1975-03-11
JPS5548693B2 true JPS5548693B2 (en) 1980-12-08

Family

ID=13478700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7206873A Expired JPS5548693B2 (en) 1973-06-26 1973-06-26

Country Status (1)

Country Link
JP (1) JPS5548693B2 (en)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5239364A (en) * 1975-09-25 1977-03-26 Hitachi Ltd Apparatus for printing pattern for shadow mask on dry plate
JPS5459883A (en) * 1978-10-11 1979-05-14 Hitachi Ltd Pattern printing apparatus
DE2905635A1 (en) * 1979-02-14 1980-08-21 Censor Patent Versuch METHOD AND DEVICE FOR ALIGNING THE IMAGE AND / OR OBJECT AREAS IN OPTICAL COPYING DEVICES
JPS5897008A (en) * 1981-12-04 1983-06-09 Hitachi Ltd Positioning method for semiconductor laser and collimator lens
JPS5928337A (en) * 1982-08-09 1984-02-15 Hitachi Ltd Projection aligner
JP2780302B2 (en) * 1989-02-07 1998-07-30 キヤノン株式会社 Exposure equipment
JPH03123016A (en) * 1990-08-15 1991-05-24 Hitachi Ltd Exposing method
JP2637714B2 (en) * 1995-07-28 1997-08-06 キヤノン株式会社 Projection exposure equipment

Also Published As

Publication number Publication date
JPS5022577A (en) 1975-03-11

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