JPS5545223U - - Google Patents
Info
- Publication number
- JPS5545223U JPS5545223U JP12695978U JP12695978U JPS5545223U JP S5545223 U JPS5545223 U JP S5545223U JP 12695978 U JP12695978 U JP 12695978U JP 12695978 U JP12695978 U JP 12695978U JP S5545223 U JPS5545223 U JP S5545223U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12695978U JPS5545223U (en) | 1978-09-18 | 1978-09-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12695978U JPS5545223U (en) | 1978-09-18 | 1978-09-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5545223U true JPS5545223U (en) | 1980-03-25 |
Family
ID=29089284
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12695978U Pending JPS5545223U (en) | 1978-09-18 | 1978-09-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5545223U (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6066826A (en) * | 1983-09-22 | 1985-04-17 | Matsushita Electronics Corp | Manufacture of semiconductor element |
| JP2001203201A (en) * | 1999-11-01 | 2001-07-27 | Applied Materials Inc | Barrier layer deposition using hdp-cvd |
-
1978
- 1978-09-18 JP JP12695978U patent/JPS5545223U/ja active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6066826A (en) * | 1983-09-22 | 1985-04-17 | Matsushita Electronics Corp | Manufacture of semiconductor element |
| JP2001203201A (en) * | 1999-11-01 | 2001-07-27 | Applied Materials Inc | Barrier layer deposition using hdp-cvd |
| JP4659202B2 (en) * | 1999-11-01 | 2011-03-30 | アプライド マテリアルズ インコーポレイテッド | How to deposit a barrier layer |