JPS5539011B2 - - Google Patents

Info

Publication number
JPS5539011B2
JPS5539011B2 JP6671774A JP6671774A JPS5539011B2 JP S5539011 B2 JPS5539011 B2 JP S5539011B2 JP 6671774 A JP6671774 A JP 6671774A JP 6671774 A JP6671774 A JP 6671774A JP S5539011 B2 JPS5539011 B2 JP S5539011B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6671774A
Other languages
Japanese (ja)
Other versions
JPS50159642A (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6671774A priority Critical patent/JPS5539011B2/ja
Publication of JPS50159642A publication Critical patent/JPS50159642A/ja
Publication of JPS5539011B2 publication Critical patent/JPS5539011B2/ja
Expired legal-status Critical Current

Links

JP6671774A 1974-06-12 1974-06-12 Expired JPS5539011B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6671774A JPS5539011B2 (cs) 1974-06-12 1974-06-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6671774A JPS5539011B2 (cs) 1974-06-12 1974-06-12

Publications (2)

Publication Number Publication Date
JPS50159642A JPS50159642A (cs) 1975-12-24
JPS5539011B2 true JPS5539011B2 (cs) 1980-10-08

Family

ID=13323925

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6671774A Expired JPS5539011B2 (cs) 1974-06-12 1974-06-12

Country Status (1)

Country Link
JP (1) JPS5539011B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180028969A (ko) * 2016-09-09 2018-03-19 캐논 가부시끼가이샤 조명 광학계, 노광 장치 및 물품 제조 방법

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS50110248A (cs) * 1974-02-06 1975-08-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20180028969A (ko) * 2016-09-09 2018-03-19 캐논 가부시끼가이샤 조명 광학계, 노광 장치 및 물품 제조 방법

Also Published As

Publication number Publication date
JPS50159642A (cs) 1975-12-24

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