JPS5535851B2 - - Google Patents
Info
- Publication number
- JPS5535851B2 JPS5535851B2 JP10887576A JP10887576A JPS5535851B2 JP S5535851 B2 JPS5535851 B2 JP S5535851B2 JP 10887576 A JP10887576 A JP 10887576A JP 10887576 A JP10887576 A JP 10887576A JP S5535851 B2 JPS5535851 B2 JP S5535851B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10887576A JPS5335384A (en) | 1976-09-13 | 1976-09-13 | Aligning method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10887576A JPS5335384A (en) | 1976-09-13 | 1976-09-13 | Aligning method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5335384A JPS5335384A (en) | 1978-04-01 |
| JPS5535851B2 true JPS5535851B2 (cs) | 1980-09-17 |
Family
ID=14495796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10887576A Granted JPS5335384A (en) | 1976-09-13 | 1976-09-13 | Aligning method |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5335384A (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177225U (cs) * | 1986-04-23 | 1987-11-11 |
-
1976
- 1976-09-13 JP JP10887576A patent/JPS5335384A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62177225U (cs) * | 1986-04-23 | 1987-11-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5335384A (en) | 1978-04-01 |