JPS5533587B2 - - Google Patents

Info

Publication number
JPS5533587B2
JPS5533587B2 JP8878672A JP8878672A JPS5533587B2 JP S5533587 B2 JPS5533587 B2 JP S5533587B2 JP 8878672 A JP8878672 A JP 8878672A JP 8878672 A JP8878672 A JP 8878672A JP S5533587 B2 JPS5533587 B2 JP S5533587B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8878672A
Other languages
Japanese (ja)
Other versions
JPS4946996A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8878672A priority Critical patent/JPS5533587B2/ja
Publication of JPS4946996A publication Critical patent/JPS4946996A/ja
Publication of JPS5533587B2 publication Critical patent/JPS5533587B2/ja
Expired legal-status Critical Current

Links

JP8878672A 1972-09-06 1972-09-06 Expired JPS5533587B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8878672A JPS5533587B2 (en) 1972-09-06 1972-09-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8878672A JPS5533587B2 (en) 1972-09-06 1972-09-06

Publications (2)

Publication Number Publication Date
JPS4946996A JPS4946996A (en) 1974-05-07
JPS5533587B2 true JPS5533587B2 (en) 1980-09-01

Family

ID=13952516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8878672A Expired JPS5533587B2 (en) 1972-09-06 1972-09-06

Country Status (1)

Country Link
JP (1) JPS5533587B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6770888B1 (en) * 2003-05-15 2004-08-03 Axcelis Technologies, Inc. High mass resolution magnet for ribbon beam ion implanters

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136638A (en) * 1974-09-24 1976-03-27 Dowa Co NETSUDENTSUITO JUKIKABAANA

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136638A (en) * 1974-09-24 1976-03-27 Dowa Co NETSUDENTSUITO JUKIKABAANA

Also Published As

Publication number Publication date
JPS4946996A (en) 1974-05-07

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