JPS5533587B2 - - Google Patents
Info
- Publication number
- JPS5533587B2 JPS5533587B2 JP8878672A JP8878672A JPS5533587B2 JP S5533587 B2 JPS5533587 B2 JP S5533587B2 JP 8878672 A JP8878672 A JP 8878672A JP 8878672 A JP8878672 A JP 8878672A JP S5533587 B2 JPS5533587 B2 JP S5533587B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8878672A JPS5533587B2 (en) | 1972-09-06 | 1972-09-06 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8878672A JPS5533587B2 (en) | 1972-09-06 | 1972-09-06 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4946996A JPS4946996A (en) | 1974-05-07 |
JPS5533587B2 true JPS5533587B2 (en) | 1980-09-01 |
Family
ID=13952516
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8878672A Expired JPS5533587B2 (en) | 1972-09-06 | 1972-09-06 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5533587B2 (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6770888B1 (en) * | 2003-05-15 | 2004-08-03 | Axcelis Technologies, Inc. | High mass resolution magnet for ribbon beam ion implanters |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5136638A (en) * | 1974-09-24 | 1976-03-27 | Dowa Co | NETSUDENTSUITO JUKIKABAANA |
-
1972
- 1972-09-06 JP JP8878672A patent/JPS5533587B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5136638A (en) * | 1974-09-24 | 1976-03-27 | Dowa Co | NETSUDENTSUITO JUKIKABAANA |
Also Published As
Publication number | Publication date |
---|---|
JPS4946996A (en) | 1974-05-07 |