JPS5532607B2 - - Google Patents

Info

Publication number
JPS5532607B2
JPS5532607B2 JP4272376A JP4272376A JPS5532607B2 JP S5532607 B2 JPS5532607 B2 JP S5532607B2 JP 4272376 A JP4272376 A JP 4272376A JP 4272376 A JP4272376 A JP 4272376A JP S5532607 B2 JPS5532607 B2 JP S5532607B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP4272376A
Other languages
Japanese (ja)
Other versions
JPS52126862A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4272376A priority Critical patent/JPS52126862A/ja
Publication of JPS52126862A publication Critical patent/JPS52126862A/ja
Publication of JPS5532607B2 publication Critical patent/JPS5532607B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Discharge Of Articles From Conveyors (AREA)
  • Control Of Conveyors (AREA)
JP4272376A 1976-04-15 1976-04-15 Monitor and control system for conveying line Granted JPS52126862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4272376A JPS52126862A (en) 1976-04-15 1976-04-15 Monitor and control system for conveying line

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4272376A JPS52126862A (en) 1976-04-15 1976-04-15 Monitor and control system for conveying line

Publications (2)

Publication Number Publication Date
JPS52126862A JPS52126862A (en) 1977-10-25
JPS5532607B2 true JPS5532607B2 (US06252093-20010626-C00008.png) 1980-08-26

Family

ID=12643977

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4272376A Granted JPS52126862A (en) 1976-04-15 1976-04-15 Monitor and control system for conveying line

Country Status (1)

Country Link
JP (1) JPS52126862A (US06252093-20010626-C00008.png)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0693477B2 (ja) * 1986-10-20 1994-11-16 東京エレクトロン株式会社 イオン注入装置

Also Published As

Publication number Publication date
JPS52126862A (en) 1977-10-25

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