JPS5531986B2 - - Google Patents
Info
- Publication number
- JPS5531986B2 JPS5531986B2 JP791473A JP791473A JPS5531986B2 JP S5531986 B2 JPS5531986 B2 JP S5531986B2 JP 791473 A JP791473 A JP 791473A JP 791473 A JP791473 A JP 791473A JP S5531986 B2 JPS5531986 B2 JP S5531986B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP791473A JPS5531986B2 (cs) | 1973-01-19 | 1973-01-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP791473A JPS5531986B2 (cs) | 1973-01-19 | 1973-01-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4998173A JPS4998173A (cs) | 1974-09-17 |
| JPS5531986B2 true JPS5531986B2 (cs) | 1980-08-22 |
Family
ID=11678796
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP791473A Expired JPS5531986B2 (cs) | 1973-01-19 | 1973-01-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5531986B2 (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014175087A1 (ja) * | 2013-04-25 | 2014-10-30 | 株式会社日立ハイテクノロジーズ | 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6081749A (ja) * | 1983-10-12 | 1985-05-09 | Jeol Ltd | イオンビ−ム装置 |
| JPH0619960B2 (ja) * | 1986-12-27 | 1994-03-16 | 日本電子株式会社 | 熱電界放射型電子源を有した電子線装置 |
| JPS63276856A (ja) * | 1986-12-27 | 1988-11-15 | Jeol Ltd | 電界放射電子源を有した電子線装置 |
| KR100973337B1 (ko) * | 2005-06-03 | 2010-07-30 | 전자빔기술센터 주식회사 | 단순 구조의 초소형 전자칼럼 |
-
1973
- 1973-01-19 JP JP791473A patent/JPS5531986B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014175087A1 (ja) * | 2013-04-25 | 2014-10-30 | 株式会社日立ハイテクノロジーズ | 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置 |
| JP2014216182A (ja) * | 2013-04-25 | 2014-11-17 | 株式会社日立ハイテクノロジーズ | 電子銃、荷電粒子銃およびそれらを用いた荷電粒子線装置 |
| US9570268B2 (en) | 2013-04-25 | 2017-02-14 | Hitachi High-Technologies Corporation | Electron gun, charged particle gun, and charged particle beam apparatus using electron gun and charged particle gun |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4998173A (cs) | 1974-09-17 |