JPS5529500B2 - - Google Patents
Info
- Publication number
- JPS5529500B2 JPS5529500B2 JP3680175A JP3680175A JPS5529500B2 JP S5529500 B2 JPS5529500 B2 JP S5529500B2 JP 3680175 A JP3680175 A JP 3680175A JP 3680175 A JP3680175 A JP 3680175A JP S5529500 B2 JPS5529500 B2 JP S5529500B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/0021—Reactive sputtering or evaporation
- C23C14/0036—Reactive sputtering
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physical Vapour Deposition (AREA)
- Magnetic Record Carriers (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3680175A JPS51112307A (en) | 1975-03-28 | 1975-03-28 | Method to form protection film on a magnetic recording medium |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3680175A JPS51112307A (en) | 1975-03-28 | 1975-03-28 | Method to form protection film on a magnetic recording medium |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS51112307A JPS51112307A (en) | 1976-10-04 |
JPS5529500B2 true JPS5529500B2 (US20080138455A1-20080612-C00006.png) | 1980-08-04 |
Family
ID=12479878
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3680175A Granted JPS51112307A (en) | 1975-03-28 | 1975-03-28 | Method to form protection film on a magnetic recording medium |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS51112307A (US20080138455A1-20080612-C00006.png) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2504116A1 (fr) * | 1981-04-15 | 1982-10-22 | Commissariat Energie Atomique | Procede d'obtention de couches de verres luminescents, application a la realisation de dispositifs munis de ces couches et a la realisation de photoscintillateurs. |
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1975
- 1975-03-28 JP JP3680175A patent/JPS51112307A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS51112307A (en) | 1976-10-04 |