JPS5526170Y2 - - Google Patents
Info
- Publication number
- JPS5526170Y2 JPS5526170Y2 JP16503775U JP16503775U JPS5526170Y2 JP S5526170 Y2 JPS5526170 Y2 JP S5526170Y2 JP 16503775 U JP16503775 U JP 16503775U JP 16503775 U JP16503775 U JP 16503775U JP S5526170 Y2 JPS5526170 Y2 JP S5526170Y2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16503775U JPS5526170Y2 (en:Method) | 1975-12-05 | 1975-12-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16503775U JPS5526170Y2 (en:Method) | 1975-12-05 | 1975-12-05 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5277104U JPS5277104U (en:Method) | 1977-06-09 |
| JPS5526170Y2 true JPS5526170Y2 (en:Method) | 1980-06-24 |
Family
ID=28643794
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16503775U Expired JPS5526170Y2 (en:Method) | 1975-12-05 | 1975-12-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5526170Y2 (en:Method) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6911101B2 (ja) * | 2016-09-28 | 2021-07-28 | ミコ セラミックス リミテッド | 接地クランプユニット及びこれを含む基板支持アセンブリー |
| KR102559456B1 (ko) * | 2016-09-28 | 2023-07-26 | 주식회사 미코세라믹스 | 기판 지지 어셈블리 |
-
1975
- 1975-12-05 JP JP16503775U patent/JPS5526170Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5277104U (en:Method) | 1977-06-09 |