JPS5526170Y2 - - Google Patents

Info

Publication number
JPS5526170Y2
JPS5526170Y2 JP16503775U JP16503775U JPS5526170Y2 JP S5526170 Y2 JPS5526170 Y2 JP S5526170Y2 JP 16503775 U JP16503775 U JP 16503775U JP 16503775 U JP16503775 U JP 16503775U JP S5526170 Y2 JPS5526170 Y2 JP S5526170Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP16503775U
Other languages
Japanese (ja)
Other versions
JPS5277104U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP16503775U priority Critical patent/JPS5526170Y2/ja
Publication of JPS5277104U publication Critical patent/JPS5277104U/ja
Application granted granted Critical
Publication of JPS5526170Y2 publication Critical patent/JPS5526170Y2/ja
Expired legal-status Critical Current

Links

JP16503775U 1975-12-05 1975-12-05 Expired JPS5526170Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16503775U JPS5526170Y2 (enrdf_load_stackoverflow) 1975-12-05 1975-12-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16503775U JPS5526170Y2 (enrdf_load_stackoverflow) 1975-12-05 1975-12-05

Publications (2)

Publication Number Publication Date
JPS5277104U JPS5277104U (enrdf_load_stackoverflow) 1977-06-09
JPS5526170Y2 true JPS5526170Y2 (enrdf_load_stackoverflow) 1980-06-24

Family

ID=28643794

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16503775U Expired JPS5526170Y2 (enrdf_load_stackoverflow) 1975-12-05 1975-12-05

Country Status (1)

Country Link
JP (1) JPS5526170Y2 (enrdf_load_stackoverflow)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2018062710A1 (ko) * 2016-09-28 2018-04-05 주식회사 미코 접지 클램핑 유닛 및 이를 포함하는 기판 지지 어셈블리
KR102559456B1 (ko) * 2016-09-28 2023-07-26 주식회사 미코세라믹스 기판 지지 어셈블리

Also Published As

Publication number Publication date
JPS5277104U (enrdf_load_stackoverflow) 1977-06-09

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