JPS5526120B2 - - Google Patents
Info
- Publication number
- JPS5526120B2 JPS5526120B2 JP9028474A JP9028474A JPS5526120B2 JP S5526120 B2 JPS5526120 B2 JP S5526120B2 JP 9028474 A JP9028474 A JP 9028474A JP 9028474 A JP9028474 A JP 9028474A JP S5526120 B2 JPS5526120 B2 JP S5526120B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9028474A JPS5120356A (en) | 1974-08-08 | 1974-08-08 | Fuookurifutono tentoboshisochi |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP9028474A JPS5120356A (en) | 1974-08-08 | 1974-08-08 | Fuookurifutono tentoboshisochi |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5120356A JPS5120356A (en) | 1976-02-18 |
JPS5526120B2 true JPS5526120B2 (en) | 1980-07-10 |
Family
ID=13994205
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP9028474A Granted JPS5120356A (en) | 1974-08-08 | 1974-08-08 | Fuookurifutono tentoboshisochi |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5120356A (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57134558A (en) * | 1981-02-16 | 1982-08-19 | Fuji Photo Film Co Ltd | Production of organic vapor deposited thin film |
JPS5864021A (en) * | 1981-10-14 | 1983-04-16 | Hitachi Ltd | Manufacturing device for continuously film |
KR0170391B1 (en) * | 1989-06-16 | 1999-03-30 | 다카시마 히로시 | Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support |
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1974
- 1974-08-08 JP JP9028474A patent/JPS5120356A/en active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5120356A (en) | 1976-02-18 |