JPS5526120B2 - - Google Patents

Info

Publication number
JPS5526120B2
JPS5526120B2 JP9028474A JP9028474A JPS5526120B2 JP S5526120 B2 JPS5526120 B2 JP S5526120B2 JP 9028474 A JP9028474 A JP 9028474A JP 9028474 A JP9028474 A JP 9028474A JP S5526120 B2 JPS5526120 B2 JP S5526120B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP9028474A
Other languages
Japanese (ja)
Other versions
JPS5120356A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9028474A priority Critical patent/JPS5120356A/en
Publication of JPS5120356A publication Critical patent/JPS5120356A/en
Publication of JPS5526120B2 publication Critical patent/JPS5526120B2/ja
Granted legal-status Critical Current

Links

JP9028474A 1974-08-08 1974-08-08 Fuookurifutono tentoboshisochi Granted JPS5120356A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9028474A JPS5120356A (en) 1974-08-08 1974-08-08 Fuookurifutono tentoboshisochi

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9028474A JPS5120356A (en) 1974-08-08 1974-08-08 Fuookurifutono tentoboshisochi

Publications (2)

Publication Number Publication Date
JPS5120356A JPS5120356A (en) 1976-02-18
JPS5526120B2 true JPS5526120B2 (en) 1980-07-10

Family

ID=13994205

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9028474A Granted JPS5120356A (en) 1974-08-08 1974-08-08 Fuookurifutono tentoboshisochi

Country Status (1)

Country Link
JP (1) JPS5120356A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134558A (en) * 1981-02-16 1982-08-19 Fuji Photo Film Co Ltd Production of organic vapor deposited thin film
JPS5864021A (en) * 1981-10-14 1983-04-16 Hitachi Ltd Manufacturing device for continuously film
KR0170391B1 (en) * 1989-06-16 1999-03-30 다카시마 히로시 Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support

Also Published As

Publication number Publication date
JPS5120356A (en) 1976-02-18

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