JPS5526036Y2 - - Google Patents

Info

Publication number
JPS5526036Y2
JPS5526036Y2 JP13602275U JP13602275U JPS5526036Y2 JP S5526036 Y2 JPS5526036 Y2 JP S5526036Y2 JP 13602275 U JP13602275 U JP 13602275U JP 13602275 U JP13602275 U JP 13602275U JP S5526036 Y2 JPS5526036 Y2 JP S5526036Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP13602275U
Other languages
Japanese (ja)
Other versions
JPS5249351U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13602275U priority Critical patent/JPS5526036Y2/ja
Publication of JPS5249351U publication Critical patent/JPS5249351U/ja
Application granted granted Critical
Publication of JPS5526036Y2 publication Critical patent/JPS5526036Y2/ja
Expired legal-status Critical Current

Links

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  • Physical Or Chemical Processes And Apparatus (AREA)
JP13602275U 1975-10-03 1975-10-03 Expired JPS5526036Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13602275U JPS5526036Y2 (enrdf_load_stackoverflow) 1975-10-03 1975-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13602275U JPS5526036Y2 (enrdf_load_stackoverflow) 1975-10-03 1975-10-03

Publications (2)

Publication Number Publication Date
JPS5249351U JPS5249351U (enrdf_load_stackoverflow) 1977-04-08
JPS5526036Y2 true JPS5526036Y2 (enrdf_load_stackoverflow) 1980-06-23

Family

ID=28616041

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13602275U Expired JPS5526036Y2 (enrdf_load_stackoverflow) 1975-10-03 1975-10-03

Country Status (1)

Country Link
JP (1) JPS5526036Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0715898B2 (ja) * 1984-12-24 1995-02-22 株式会社日立製作所 マイクロ波プラズマ処理装置

Also Published As

Publication number Publication date
JPS5249351U (enrdf_load_stackoverflow) 1977-04-08

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