JPS5525037U - - Google Patents

Info

Publication number
JPS5525037U
JPS5525037U JP10706878U JP10706878U JPS5525037U JP S5525037 U JPS5525037 U JP S5525037U JP 10706878 U JP10706878 U JP 10706878U JP 10706878 U JP10706878 U JP 10706878U JP S5525037 U JPS5525037 U JP S5525037U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10706878U
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10706878U priority Critical patent/JPS5525037U/ja
Publication of JPS5525037U publication Critical patent/JPS5525037U/ja
Application status is Pending legal-status Critical

Links

JP10706878U 1978-08-05 1978-08-05 Pending JPS5525037U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10706878U JPS5525037U (en) 1978-08-05 1978-08-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10706878U JPS5525037U (en) 1978-08-05 1978-08-05

Publications (1)

Publication Number Publication Date
JPS5525037U true JPS5525037U (en) 1980-02-18

Family

ID=29050831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10706878U Pending JPS5525037U (en) 1978-08-05 1978-08-05

Country Status (1)

Country Link
JP (1) JPS5525037U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457637A (en) * 1987-05-22 1989-03-03 American Telephone & Telegraph Method and apparatus for handling wafer

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6457637A (en) * 1987-05-22 1989-03-03 American Telephone & Telegraph Method and apparatus for handling wafer
JPH0322058B2 (en) * 1987-05-22 1991-03-26 Amerikan Terefuon Ando Teregurafu Co

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