JPS5523909B2 - - Google Patents

Info

Publication number
JPS5523909B2
JPS5523909B2 JP3925576A JP3925576A JPS5523909B2 JP S5523909 B2 JPS5523909 B2 JP S5523909B2 JP 3925576 A JP3925576 A JP 3925576A JP 3925576 A JP3925576 A JP 3925576A JP S5523909 B2 JPS5523909 B2 JP S5523909B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP3925576A
Other languages
Japanese (ja)
Other versions
JPS52123362A (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3925576A priority Critical patent/JPS52123362A/ja
Priority to US05/725,487 priority patent/US4080281A/en
Publication of JPS52123362A publication Critical patent/JPS52123362A/ja
Publication of JPS5523909B2 publication Critical patent/JPS5523909B2/ja
Granted legal-status Critical Current

Links

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  • Physical Vapour Deposition (AREA)
JP3925576A 1976-04-09 1976-04-09 Device for making thin metal film Granted JPS52123362A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP3925576A JPS52123362A (en) 1976-04-09 1976-04-09 Device for making thin metal film
US05/725,487 US4080281A (en) 1976-04-09 1976-09-22 Apparatus for making metal films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3925576A JPS52123362A (en) 1976-04-09 1976-04-09 Device for making thin metal film

Publications (2)

Publication Number Publication Date
JPS52123362A JPS52123362A (en) 1977-10-17
JPS5523909B2 true JPS5523909B2 (US08142518-20120327-C00011.png) 1980-06-25

Family

ID=12548021

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3925576A Granted JPS52123362A (en) 1976-04-09 1976-04-09 Device for making thin metal film

Country Status (1)

Country Link
JP (1) JPS52123362A (US08142518-20120327-C00011.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645892U (US08142518-20120327-C00011.png) * 1987-06-30 1989-01-13
JPH0190688U (US08142518-20120327-C00011.png) * 1987-12-07 1989-06-14

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5641375A (en) * 1979-09-13 1981-04-18 Matsushita Electric Ind Co Ltd Sputtering apparatus
JP3192642B2 (ja) 1998-10-02 2001-07-30 住友特殊金属株式会社 表面処理用支持部材、表面処理用ホルダー、並びに表面処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515279A (en) * 1974-05-28 1976-01-16 Corning Glass Works Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515279A (en) * 1974-05-28 1976-01-16 Corning Glass Works Fukusunoenchukeibutsutaioitsuseinihifukusuruhohooyobi kaitensupatsutasochi

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS645892U (US08142518-20120327-C00011.png) * 1987-06-30 1989-01-13
JPH0190688U (US08142518-20120327-C00011.png) * 1987-12-07 1989-06-14

Also Published As

Publication number Publication date
JPS52123362A (en) 1977-10-17

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