JPS5519425B2 - - Google Patents
Info
- Publication number
- JPS5519425B2 JPS5519425B2 JP4483175A JP4483175A JPS5519425B2 JP S5519425 B2 JPS5519425 B2 JP S5519425B2 JP 4483175 A JP4483175 A JP 4483175A JP 4483175 A JP4483175 A JP 4483175A JP S5519425 B2 JPS5519425 B2 JP S5519425B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Projection-Type Copiers In General (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Control Of Position Or Direction (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50044831A JPS51120180A (en) | 1975-04-15 | 1975-04-15 | Pattern printing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP50044831A JPS51120180A (en) | 1975-04-15 | 1975-04-15 | Pattern printing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS51120180A JPS51120180A (en) | 1976-10-21 |
| JPS5519425B2 true JPS5519425B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1980-05-26 |
Family
ID=12702396
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP50044831A Granted JPS51120180A (en) | 1975-04-15 | 1975-04-15 | Pattern printing device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS51120180A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6277034A (ja) * | 1985-09-25 | 1987-04-09 | Nippon Denso Co Ltd | 車両用交流発電機 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5364479A (en) * | 1976-11-22 | 1978-06-08 | Nippon Telegr & Teleph Corp <Ntt> | Position aligning system |
| JPS5496358A (en) * | 1977-12-24 | 1979-07-30 | Nec Home Electronics Ltd | Manufacture of semiconductor device |
| JPS5496374A (en) * | 1978-01-17 | 1979-07-30 | Hitachi Ltd | Automatic positioning device |
| JPS54114183A (en) * | 1978-02-27 | 1979-09-06 | Canon Inc | Position matching method |
| JPS5560949A (en) * | 1978-10-31 | 1980-05-08 | Nippon Telegr & Teleph Corp <Ntt> | Positioning mark for radiation working |
| JPS587136A (ja) * | 1981-07-06 | 1983-01-14 | Hitachi Ltd | 投影式露光方法およびその装置 |
| JPS5831526A (ja) * | 1981-08-19 | 1983-02-24 | Nippon Kogaku Kk <Nikon> | 焼付装置のアライメント装置 |
| JPS5918950A (ja) * | 1982-07-09 | 1984-01-31 | パ−キン−エルマ−・ツエンゾ−ル・アンシユタルト | 加工片上へのマスクの投影転写装置およびその調整方法 |
| JPS62199031A (ja) * | 1986-02-27 | 1987-09-02 | Rohm Co Ltd | 露光装置 |
| JPS63175859A (ja) * | 1987-01-16 | 1988-07-20 | Ushio Inc | 液晶基板製作の露光方式 |
| JPH0316113A (ja) * | 1990-06-15 | 1991-01-24 | Hitachi Ltd | 露光装置 |
| JP2562270Y2 (ja) * | 1991-04-23 | 1998-02-10 | 安藤電気株式会社 | 光による移動体の停止機構 |
| JP4617150B2 (ja) * | 2004-12-09 | 2011-01-19 | キヤノン株式会社 | ウエハのダイシング方法 |
| US20070115452A1 (en) * | 2005-11-23 | 2007-05-24 | Asml Netherlands B.V. | Method of measuring the magnification of a projection system, device manufacturing method and computer program product |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3742229A (en) * | 1972-06-29 | 1973-06-26 | Massachusetts Inst Technology | Soft x-ray mask alignment system |
-
1975
- 1975-04-15 JP JP50044831A patent/JPS51120180A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6277034A (ja) * | 1985-09-25 | 1987-04-09 | Nippon Denso Co Ltd | 車両用交流発電機 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS51120180A (en) | 1976-10-21 |