JPS5518777B2 - - Google Patents
Info
- Publication number
- JPS5518777B2 JPS5518777B2 JP1199072A JP1199072A JPS5518777B2 JP S5518777 B2 JPS5518777 B2 JP S5518777B2 JP 1199072 A JP1199072 A JP 1199072A JP 1199072 A JP1199072 A JP 1199072A JP S5518777 B2 JPS5518777 B2 JP S5518777B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1199072A JPS5518777B2 (cs) | 1972-02-02 | 1972-02-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1199072A JPS5518777B2 (cs) | 1972-02-02 | 1972-02-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4880416A JPS4880416A (cs) | 1973-10-27 |
| JPS5518777B2 true JPS5518777B2 (cs) | 1980-05-21 |
Family
ID=11793010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1199072A Expired JPS5518777B2 (cs) | 1972-02-02 | 1972-02-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5518777B2 (cs) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR102027793B1 (ko) | 2016-01-05 | 2019-10-02 | 후지필름 가부시키가이샤 | 처리액, 기판의 세정 방법 및 반도체 디바이스의 제조 방법 |
-
1972
- 1972-02-02 JP JP1199072A patent/JPS5518777B2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4880416A (cs) | 1973-10-27 |