JPS55172805U - - Google Patents
Info
- Publication number
- JPS55172805U JPS55172805U JP7138579U JP7138579U JPS55172805U JP S55172805 U JPS55172805 U JP S55172805U JP 7138579 U JP7138579 U JP 7138579U JP 7138579 U JP7138579 U JP 7138579U JP S55172805 U JPS55172805 U JP S55172805U
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7138579U JPS618981Y2 (zh) | 1979-05-29 | 1979-05-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7138579U JPS618981Y2 (zh) | 1979-05-29 | 1979-05-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55172805U true JPS55172805U (zh) | 1980-12-11 |
| JPS618981Y2 JPS618981Y2 (zh) | 1986-03-20 |
Family
ID=29305089
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7138579U Expired JPS618981Y2 (zh) | 1979-05-29 | 1979-05-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS618981Y2 (zh) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013104085A (ja) * | 2011-11-11 | 2013-05-30 | Hitachi Zosen Corp | 電子ビーム蒸着装置用膜厚センサ装置 |
| JP2020023737A (ja) * | 2018-08-08 | 2020-02-13 | キヤノントッキ株式会社 | 成膜レートモニタ装置及び成膜装置 |
-
1979
- 1979-05-29 JP JP7138579U patent/JPS618981Y2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013104085A (ja) * | 2011-11-11 | 2013-05-30 | Hitachi Zosen Corp | 電子ビーム蒸着装置用膜厚センサ装置 |
| JP2020023737A (ja) * | 2018-08-08 | 2020-02-13 | キヤノントッキ株式会社 | 成膜レートモニタ装置及び成膜装置 |
| CN110819962A (zh) * | 2018-08-08 | 2020-02-21 | 佳能特机株式会社 | 成膜速率监视装置及成膜装置 |
| CN110819962B (zh) * | 2018-08-08 | 2023-07-14 | 佳能特机株式会社 | 成膜速率监视装置及成膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS618981Y2 (zh) | 1986-03-20 |