JPS55163862A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS55163862A
JPS55163862A JP7170679A JP7170679A JPS55163862A JP S55163862 A JPS55163862 A JP S55163862A JP 7170679 A JP7170679 A JP 7170679A JP 7170679 A JP7170679 A JP 7170679A JP S55163862 A JPS55163862 A JP S55163862A
Authority
JP
Japan
Prior art keywords
wiring
insulating film
opening
film
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7170679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6119113B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masanori Fukumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7170679A priority Critical patent/JPS55163862A/ja
Publication of JPS55163862A publication Critical patent/JPS55163862A/ja
Publication of JPS6119113B2 publication Critical patent/JPS6119113B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP7170679A 1979-06-07 1979-06-07 Manufacture of semiconductor device Granted JPS55163862A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7170679A JPS55163862A (en) 1979-06-07 1979-06-07 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7170679A JPS55163862A (en) 1979-06-07 1979-06-07 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS55163862A true JPS55163862A (en) 1980-12-20
JPS6119113B2 JPS6119113B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-15

Family

ID=13468244

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7170679A Granted JPS55163862A (en) 1979-06-07 1979-06-07 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS55163862A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6383714U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1986-11-20 1988-06-01

Also Published As

Publication number Publication date
JPS6119113B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-05-15

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