JPS55160424A - Vapor phase epitaxial device - Google Patents
Vapor phase epitaxial deviceInfo
- Publication number
- JPS55160424A JPS55160424A JP6687279A JP6687279A JPS55160424A JP S55160424 A JPS55160424 A JP S55160424A JP 6687279 A JP6687279 A JP 6687279A JP 6687279 A JP6687279 A JP 6687279A JP S55160424 A JPS55160424 A JP S55160424A
- Authority
- JP
- Japan
- Prior art keywords
- container
- dopant
- supporting plate
- vapor phase
- gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
Abstract
PURPOSE:To keep the uniformity of vapor temperatute when dopant are put in a container and a carrier gas is made to flow through the container to produce the dopant gas and is sent to the vapor phase epitaxial device by a method wherein plural partition plates having penetrating holes are prepared in the container leaving spaces between them and keeping each hole position as not to come on the same projection line. CONSTITUTION:The dopant gas to be sent in the vapor phase epitaxial device containing a semiconductor substrate is produced as follows. The container 11 to contain the dopant 14 is made to be a longitudinal cylindrical form, etc., and a supporting plate 23 to put the dopant 14 on it having good ventilation, and plural quartz partition plates 20-22 to be located under the supporting plate, are arranged in the container. The carrier gas send-in pipe 12 is inserted into the container 11 from the upper end to the bottom, and a send-out pipe 13 of the dopant gas produced in the container is fitted to the container wall locating over the supporting plate 23. In this constitution, plural numbers of holes 20a-22a are so prepared on each partition plate 20-22 as not to come in the same position on a common projection face, and the heated carrier gas is made to contact with the dopant 14 being fully stirred and kept in an uniform temperature.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6687279A JPS55160424A (en) | 1979-05-31 | 1979-05-31 | Vapor phase epitaxial device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6687279A JPS55160424A (en) | 1979-05-31 | 1979-05-31 | Vapor phase epitaxial device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS55160424A true JPS55160424A (en) | 1980-12-13 |
Family
ID=13328381
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6687279A Pending JPS55160424A (en) | 1979-05-31 | 1979-05-31 | Vapor phase epitaxial device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS55160424A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7828274B2 (en) | 2002-07-23 | 2010-11-09 | Advanced Technology Materials, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
US10385452B2 (en) | 2012-05-31 | 2019-08-20 | Entegris, Inc. | Source reagent-based delivery of fluid with high material flux for batch deposition |
US10895010B2 (en) | 2006-08-31 | 2021-01-19 | Entegris, Inc. | Solid precursor-based delivery of fluid utilizing controlled solids morphology |
-
1979
- 1979-05-31 JP JP6687279A patent/JPS55160424A/en active Pending
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7828274B2 (en) | 2002-07-23 | 2010-11-09 | Advanced Technology Materials, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
SG167665A1 (en) * | 2002-07-23 | 2011-01-28 | Advanced Tech Materials | Vaporizer delivery ampoule |
US9004462B2 (en) | 2002-07-23 | 2015-04-14 | Entegris, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
US9469898B2 (en) | 2002-07-23 | 2016-10-18 | Entegris, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
US10465286B2 (en) | 2002-07-23 | 2019-11-05 | Entegris, Inc. | Method and apparatus to help promote contact of gas with vaporized material |
US10895010B2 (en) | 2006-08-31 | 2021-01-19 | Entegris, Inc. | Solid precursor-based delivery of fluid utilizing controlled solids morphology |
US10385452B2 (en) | 2012-05-31 | 2019-08-20 | Entegris, Inc. | Source reagent-based delivery of fluid with high material flux for batch deposition |
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