JPS5513905A - Manufacturing method of minute multi-layer wiring - Google Patents

Manufacturing method of minute multi-layer wiring

Info

Publication number
JPS5513905A
JPS5513905A JP8609678A JP8609678A JPS5513905A JP S5513905 A JPS5513905 A JP S5513905A JP 8609678 A JP8609678 A JP 8609678A JP 8609678 A JP8609678 A JP 8609678A JP S5513905 A JPS5513905 A JP S5513905A
Authority
JP
Japan
Prior art keywords
film
wiring
layer wiring
substrate
flat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8609678A
Other languages
English (en)
Inventor
Sukeyoshi Tsunekawa
Tatsumi Mizutani
Yoshio Honma
Yukiyoshi Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP8609678A priority Critical patent/JPS5513905A/ja
Publication of JPS5513905A publication Critical patent/JPS5513905A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Local Oxidation Of Silicon (AREA)
JP8609678A 1978-07-17 1978-07-17 Manufacturing method of minute multi-layer wiring Pending JPS5513905A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8609678A JPS5513905A (en) 1978-07-17 1978-07-17 Manufacturing method of minute multi-layer wiring

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8609678A JPS5513905A (en) 1978-07-17 1978-07-17 Manufacturing method of minute multi-layer wiring

Publications (1)

Publication Number Publication Date
JPS5513905A true JPS5513905A (en) 1980-01-31

Family

ID=13877167

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8609678A Pending JPS5513905A (en) 1978-07-17 1978-07-17 Manufacturing method of minute multi-layer wiring

Country Status (1)

Country Link
JP (1) JPS5513905A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967975A (ja) * 1972-11-04 1974-07-02
JPS5856325A (ja) * 1981-09-29 1983-04-04 Fujitsu Ltd プラズマｃｖｄ膜形成方法
JPS58100435A (ja) * 1981-12-10 1983-06-15 Fujitsu Ltd 半導体装置の製造方法
JPS59163850A (ja) * 1983-03-07 1984-09-14 Mitsubishi Electric Corp 半導体装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4967975A (ja) * 1972-11-04 1974-07-02
JPS5513906B2 (ja) * 1972-11-04 1980-04-12
JPS5856325A (ja) * 1981-09-29 1983-04-04 Fujitsu Ltd プラズマｃｖｄ膜形成方法
JPS58100435A (ja) * 1981-12-10 1983-06-15 Fujitsu Ltd 半導体装置の製造方法
JPS59163850A (ja) * 1983-03-07 1984-09-14 Mitsubishi Electric Corp 半導体装置

Similar Documents

Publication Publication Date Title
EP0177105A3 (en) Method for providing a semiconductor device with planarized contacts
JPS54589A (en) Burying method of insulator
JPS5513905A (en) Manufacturing method of minute multi-layer wiring
JPS5513904A (en) Semiconductor device and its manufacturing method
JPS57103330A (en) Semiconductor device
JPS55102235A (en) Formation of interlayer conductive layer
JPS5595338A (en) Integrated circuit
JPS5522865A (en) Manufacturing methof of semiconductor device
JPS5687346A (en) Manufacture of semiconductor device
JPS5527644A (en) Multi-layer wiring type semiconductor device
JPS57202756A (en) Manufacture of semiconductor device
JPS559415A (en) Semiconductor manufacturing method
JPS57100749A (en) Manufacture of semiconductor device
JPS5753964A (ja) Tasohaisenho
JPS551150A (en) Method of fabricating semiconductor device
JPS6474741A (en) Formation of multilayer interconnection
JPS56165339A (en) Semiconductor device
JPS571243A (en) Manufacture of semiconductor device
JPS5555546A (en) Method of wiring semiconductor device
JPS5792849A (en) Manufacture of semiconductor device
JPS5478668A (en) Manufacture of semiconductor device
JPS554970A (en) Formation of electrode or wiring layer on substrate
JPS54156476A (en) Manufacture for semiconductor device
JPS5787138A (en) Manufacture of semiconductor
JPS57170551A (en) Manufacture of semiconductor device