JPS55131705A - Location adjusting device - Google Patents

Location adjusting device

Info

Publication number
JPS55131705A
JPS55131705A JP3861479A JP3861479A JPS55131705A JP S55131705 A JPS55131705 A JP S55131705A JP 3861479 A JP3861479 A JP 3861479A JP 3861479 A JP3861479 A JP 3861479A JP S55131705 A JPS55131705 A JP S55131705A
Authority
JP
Japan
Prior art keywords
objects
diffraction gratings
jig
location
adjusting device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3861479A
Other languages
Japanese (ja)
Other versions
JPS6042887B2 (en
Inventor
Akira Ono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP3861479A priority Critical patent/JPS6042887B2/en
Priority to US06/114,354 priority patent/US4332473A/en
Priority to DE3003533A priority patent/DE3003533C2/en
Publication of JPS55131705A publication Critical patent/JPS55131705A/en
Publication of JPS6042887B2 publication Critical patent/JPS6042887B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To reduce a location adjustment error which is produced by a variation of the angle of incidence of the laser rays and to adjust the location of a pair of objects precisely by inserting a jig, which is provided with diffraction gratings so that these are opposite to other ones mounted on the said objects, between both the objects.
CONSTITUTION: The jig 29 is inserted between both the objects 21, 26, the second diffraction gratings 31, 32 that are opposite to the first diffraction gratings 27, 28, which are mounted on the upper face of the object 21 and lower face of the object 26 respectively, are provided on the upper and lower face of the jig 29. Laser rays are applied to these first and second diffraction gratings in the vertical direction by the laser oscillators 33, 34, and the locations of both the objects 21, 26 are adjusted by detecting the intensity of diffracted rays of both +n-degree and -n-degree. In this way, the location adjustment can precisely be performed regardless of the distance between a pair of objects.
COPYRIGHT: (C)1980,JPO&Japio
JP3861479A 1979-01-31 1979-03-31 alignment device Expired JPS6042887B2 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP3861479A JPS6042887B2 (en) 1979-03-31 1979-03-31 alignment device
US06/114,354 US4332473A (en) 1979-01-31 1980-01-22 Apparatus for detecting a mutual positional relationship of two sample members
DE3003533A DE3003533C2 (en) 1979-01-31 1980-01-31 Device for determining the mutual positional relationship between two test objects

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3861479A JPS6042887B2 (en) 1979-03-31 1979-03-31 alignment device

Publications (2)

Publication Number Publication Date
JPS55131705A true JPS55131705A (en) 1980-10-13
JPS6042887B2 JPS6042887B2 (en) 1985-09-25

Family

ID=12530124

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3861479A Expired JPS6042887B2 (en) 1979-01-31 1979-03-31 alignment device

Country Status (1)

Country Link
JP (1) JPS6042887B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7503811B2 (en) 2003-02-28 2009-03-17 Phicom Corporation Interconnection device for a printed circuit board, a method of manufacturing the same, and an interconnection assembly having the same

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7503811B2 (en) 2003-02-28 2009-03-17 Phicom Corporation Interconnection device for a printed circuit board, a method of manufacturing the same, and an interconnection assembly having the same

Also Published As

Publication number Publication date
JPS6042887B2 (en) 1985-09-25

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