JPS55131705A - Location adjusting device - Google Patents
Location adjusting deviceInfo
- Publication number
- JPS55131705A JPS55131705A JP3861479A JP3861479A JPS55131705A JP S55131705 A JPS55131705 A JP S55131705A JP 3861479 A JP3861479 A JP 3861479A JP 3861479 A JP3861479 A JP 3861479A JP S55131705 A JPS55131705 A JP S55131705A
- Authority
- JP
- Japan
- Prior art keywords
- objects
- diffraction gratings
- jig
- location
- adjusting device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To reduce a location adjustment error which is produced by a variation of the angle of incidence of the laser rays and to adjust the location of a pair of objects precisely by inserting a jig, which is provided with diffraction gratings so that these are opposite to other ones mounted on the said objects, between both the objects.
CONSTITUTION: The jig 29 is inserted between both the objects 21, 26, the second diffraction gratings 31, 32 that are opposite to the first diffraction gratings 27, 28, which are mounted on the upper face of the object 21 and lower face of the object 26 respectively, are provided on the upper and lower face of the jig 29. Laser rays are applied to these first and second diffraction gratings in the vertical direction by the laser oscillators 33, 34, and the locations of both the objects 21, 26 are adjusted by detecting the intensity of diffracted rays of both +n-degree and -n-degree. In this way, the location adjustment can precisely be performed regardless of the distance between a pair of objects.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3861479A JPS6042887B2 (en) | 1979-03-31 | 1979-03-31 | alignment device |
US06/114,354 US4332473A (en) | 1979-01-31 | 1980-01-22 | Apparatus for detecting a mutual positional relationship of two sample members |
DE3003533A DE3003533C2 (en) | 1979-01-31 | 1980-01-31 | Device for determining the mutual positional relationship between two test objects |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP3861479A JPS6042887B2 (en) | 1979-03-31 | 1979-03-31 | alignment device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55131705A true JPS55131705A (en) | 1980-10-13 |
JPS6042887B2 JPS6042887B2 (en) | 1985-09-25 |
Family
ID=12530124
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP3861479A Expired JPS6042887B2 (en) | 1979-01-31 | 1979-03-31 | alignment device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6042887B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7503811B2 (en) | 2003-02-28 | 2009-03-17 | Phicom Corporation | Interconnection device for a printed circuit board, a method of manufacturing the same, and an interconnection assembly having the same |
-
1979
- 1979-03-31 JP JP3861479A patent/JPS6042887B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7503811B2 (en) | 2003-02-28 | 2009-03-17 | Phicom Corporation | Interconnection device for a printed circuit board, a method of manufacturing the same, and an interconnection assembly having the same |
Also Published As
Publication number | Publication date |
---|---|
JPS6042887B2 (en) | 1985-09-25 |
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