JPS55121137A - Pattern check unit - Google Patents

Pattern check unit

Info

Publication number
JPS55121137A
JPS55121137A JP2844479A JP2844479A JPS55121137A JP S55121137 A JPS55121137 A JP S55121137A JP 2844479 A JP2844479 A JP 2844479A JP 2844479 A JP2844479 A JP 2844479A JP S55121137 A JPS55121137 A JP S55121137A
Authority
JP
Japan
Prior art keywords
level
signal
inspection
output signal
transition circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2844479A
Other languages
English (en)
Japanese (ja)
Other versions
JPS638419B2 (enrdf_load_stackoverflow
Inventor
Yoshifusa Wada
Yasuhide Hisamoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Original Assignee
CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHIYOU LSI GIJUTSU KENKYU KUMIAI filed Critical CHIYOU LSI GIJUTSU KENKYU KUMIAI
Priority to JP2844479A priority Critical patent/JPS55121137A/ja
Publication of JPS55121137A publication Critical patent/JPS55121137A/ja
Publication of JPS638419B2 publication Critical patent/JPS638419B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP2844479A 1979-03-12 1979-03-12 Pattern check unit Granted JPS55121137A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2844479A JPS55121137A (en) 1979-03-12 1979-03-12 Pattern check unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2844479A JPS55121137A (en) 1979-03-12 1979-03-12 Pattern check unit

Publications (2)

Publication Number Publication Date
JPS55121137A true JPS55121137A (en) 1980-09-18
JPS638419B2 JPS638419B2 (enrdf_load_stackoverflow) 1988-02-23

Family

ID=12248840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2844479A Granted JPS55121137A (en) 1979-03-12 1979-03-12 Pattern check unit

Country Status (1)

Country Link
JP (1) JPS55121137A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS638419B2 (enrdf_load_stackoverflow) 1988-02-23

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