JPS55113369A - Ohmic electrode and its manufacture - Google Patents
Ohmic electrode and its manufactureInfo
- Publication number
- JPS55113369A JPS55113369A JP2043179A JP2043179A JPS55113369A JP S55113369 A JPS55113369 A JP S55113369A JP 2043179 A JP2043179 A JP 2043179A JP 2043179 A JP2043179 A JP 2043179A JP S55113369 A JPS55113369 A JP S55113369A
- Authority
- JP
- Japan
- Prior art keywords
- film
- extracted
- iii
- ohmic electrode
- during
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910052738 indium Inorganic materials 0.000 abstract 3
- 239000002184 metal Substances 0.000 abstract 3
- 229910052751 metal Inorganic materials 0.000 abstract 3
- 238000000034 method Methods 0.000 abstract 3
- 229910052785 arsenic Inorganic materials 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- 239000004065 semiconductor Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 238000004090 dissolution Methods 0.000 abstract 1
- 238000001704 evaporation Methods 0.000 abstract 1
- 230000008020 evaporation Effects 0.000 abstract 1
- 229910052737 gold Inorganic materials 0.000 abstract 1
- 229910052735 hafnium Inorganic materials 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 229910052750 molybdenum Inorganic materials 0.000 abstract 1
- 229910052698 phosphorus Inorganic materials 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 229910052715 tantalum Inorganic materials 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
Landscapes
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2043179A JPS55113369A (en) | 1979-02-22 | 1979-02-22 | Ohmic electrode and its manufacture |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2043179A JPS55113369A (en) | 1979-02-22 | 1979-02-22 | Ohmic electrode and its manufacture |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55113369A true JPS55113369A (en) | 1980-09-01 |
| JPS6159656B2 JPS6159656B2 (enrdf_load_stackoverflow) | 1986-12-17 |
Family
ID=12026845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2043179A Granted JPS55113369A (en) | 1979-02-22 | 1979-02-22 | Ohmic electrode and its manufacture |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55113369A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62172756A (ja) * | 1986-01-21 | 1987-07-29 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | ▲ｉｉｉ▼―ｖ族化合物半導体デバイス及びその形成方法 |
| JP2023008413A (ja) * | 2021-07-06 | 2023-01-19 | ウシオ電機株式会社 | 赤外ｌｅｄ素子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51146180A (en) * | 1975-06-11 | 1976-12-15 | Mitsubishi Electric Corp | Iii-v family compound semi-conductor electric pole formation |
-
1979
- 1979-02-22 JP JP2043179A patent/JPS55113369A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS51146180A (en) * | 1975-06-11 | 1976-12-15 | Mitsubishi Electric Corp | Iii-v family compound semi-conductor electric pole formation |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62172756A (ja) * | 1986-01-21 | 1987-07-29 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | ▲ｉｉｉ▼―ｖ族化合物半導体デバイス及びその形成方法 |
| JP2023008413A (ja) * | 2021-07-06 | 2023-01-19 | ウシオ電機株式会社 | 赤外ｌｅｄ素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6159656B2 (enrdf_load_stackoverflow) | 1986-12-17 |
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