JPS55105347A - Apparatus for scribing single-crystal wafer - Google Patents

Apparatus for scribing single-crystal wafer

Info

Publication number
JPS55105347A
JPS55105347A JP1368279A JP1368279A JPS55105347A JP S55105347 A JPS55105347 A JP S55105347A JP 1368279 A JP1368279 A JP 1368279A JP 1368279 A JP1368279 A JP 1368279A JP S55105347 A JPS55105347 A JP S55105347A
Authority
JP
Japan
Prior art keywords
cut surface
light
wafer
supporting table
scribing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1368279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6157701B2 (enrdf_load_stackoverflow
Inventor
Takeo Fukatsu
Michitoshi Onishi
Masahiko Dai
Hidenori Nishiwaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sanyo Electric Co Ltd
Original Assignee
Sanyo Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sanyo Electric Co Ltd filed Critical Sanyo Electric Co Ltd
Priority to JP1368279A priority Critical patent/JPS55105347A/ja
Publication of JPS55105347A publication Critical patent/JPS55105347A/ja
Publication of JPS6157701B2 publication Critical patent/JPS6157701B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Dicing (AREA)
  • Control Of Position Or Direction (AREA)
JP1368279A 1979-02-07 1979-02-07 Apparatus for scribing single-crystal wafer Granted JPS55105347A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1368279A JPS55105347A (en) 1979-02-07 1979-02-07 Apparatus for scribing single-crystal wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1368279A JPS55105347A (en) 1979-02-07 1979-02-07 Apparatus for scribing single-crystal wafer

Publications (2)

Publication Number Publication Date
JPS55105347A true JPS55105347A (en) 1980-08-12
JPS6157701B2 JPS6157701B2 (enrdf_load_stackoverflow) 1986-12-08

Family

ID=11839944

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1368279A Granted JPS55105347A (en) 1979-02-07 1979-02-07 Apparatus for scribing single-crystal wafer

Country Status (1)

Country Link
JP (1) JPS55105347A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60120536A (ja) * 1983-12-02 1985-06-28 Rohm Co Ltd 半導体劈開面検出装置
JPS63227034A (ja) * 1987-03-17 1988-09-21 Fujitsu Ltd ウエ−ハ位置合わせ方法
JPH0312946A (ja) * 1989-06-10 1991-01-21 Tokyo Electron Ltd ウエハのプリアライメント方法

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63171003A (ja) * 1987-01-08 1988-07-14 Matsushita Electric Ind Co Ltd 衛星放送用受信コンバ−タ
JPH0251407U (enrdf_load_stackoverflow) * 1988-10-03 1990-04-11

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (enrdf_load_stackoverflow) * 1973-03-07 1974-11-05
JPS54585A (en) * 1977-06-02 1979-01-05 Terumetsuku Kk Automatic angle setting device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49115665A (enrdf_load_stackoverflow) * 1973-03-07 1974-11-05
JPS54585A (en) * 1977-06-02 1979-01-05 Terumetsuku Kk Automatic angle setting device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60120536A (ja) * 1983-12-02 1985-06-28 Rohm Co Ltd 半導体劈開面検出装置
JPS63227034A (ja) * 1987-03-17 1988-09-21 Fujitsu Ltd ウエ−ハ位置合わせ方法
JPH0312946A (ja) * 1989-06-10 1991-01-21 Tokyo Electron Ltd ウエハのプリアライメント方法

Also Published As

Publication number Publication date
JPS6157701B2 (enrdf_load_stackoverflow) 1986-12-08

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