JPS5490970A - Manufacture for semiconductor device - Google Patents

Manufacture for semiconductor device

Info

Publication number
JPS5490970A
JPS5490970A JP15760077A JP15760077A JPS5490970A JP S5490970 A JPS5490970 A JP S5490970A JP 15760077 A JP15760077 A JP 15760077A JP 15760077 A JP15760077 A JP 15760077A JP S5490970 A JPS5490970 A JP S5490970A
Authority
JP
Japan
Prior art keywords
pattern
film
sio
carbonization
grown
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15760077A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6142853B2 (enrdf_load_stackoverflow
Inventor
Kazuya Kikuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP15760077A priority Critical patent/JPS5490970A/ja
Publication of JPS5490970A publication Critical patent/JPS5490970A/ja
Publication of JPS6142853B2 publication Critical patent/JPS6142853B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Weting (AREA)
  • Drying Of Semiconductors (AREA)
JP15760077A 1977-12-28 1977-12-28 Manufacture for semiconductor device Granted JPS5490970A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15760077A JPS5490970A (en) 1977-12-28 1977-12-28 Manufacture for semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15760077A JPS5490970A (en) 1977-12-28 1977-12-28 Manufacture for semiconductor device

Publications (2)

Publication Number Publication Date
JPS5490970A true JPS5490970A (en) 1979-07-19
JPS6142853B2 JPS6142853B2 (enrdf_load_stackoverflow) 1986-09-24

Family

ID=15653250

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15760077A Granted JPS5490970A (en) 1977-12-28 1977-12-28 Manufacture for semiconductor device

Country Status (1)

Country Link
JP (1) JPS5490970A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02164055A (ja) * 1988-12-19 1990-06-25 Nec Corp 半導体装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929016A (enrdf_load_stackoverflow) * 1972-07-11 1974-03-15
JPS5020271A (enrdf_load_stackoverflow) * 1973-06-25 1975-03-04

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4929016A (enrdf_load_stackoverflow) * 1972-07-11 1974-03-15
JPS5020271A (enrdf_load_stackoverflow) * 1973-06-25 1975-03-04

Also Published As

Publication number Publication date
JPS6142853B2 (enrdf_load_stackoverflow) 1986-09-24

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