Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Showa Denko Materials Co Ltd
Original Assignee
Hitachi Chemical Co Ltd
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Chemical Co Ltd, Hitachi LtdfiledCriticalHitachi Chemical Co Ltd
Priority to JP15047377ApriorityCriticalpatent/JPS5484237A/ja
Publication of JPS5484237ApublicationCriticalpatent/JPS5484237A/ja
Publication of JPS6117103B2publicationCriticalpatent/JPS6117103B2/ja