JPS5477070A - Production of photo mask - Google Patents

Production of photo mask

Info

Publication number
JPS5477070A
JPS5477070A JP14433677A JP14433677A JPS5477070A JP S5477070 A JPS5477070 A JP S5477070A JP 14433677 A JP14433677 A JP 14433677A JP 14433677 A JP14433677 A JP 14433677A JP S5477070 A JPS5477070 A JP S5477070A
Authority
JP
Japan
Prior art keywords
emulsion
layer
portions
chromium
blackened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14433677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6122457B2 (https=
Inventor
Akira Morishige
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP14433677A priority Critical patent/JPS5477070A/ja
Publication of JPS5477070A publication Critical patent/JPS5477070A/ja
Publication of JPS6122457B2 publication Critical patent/JPS6122457B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP14433677A 1977-12-01 1977-12-01 Production of photo mask Granted JPS5477070A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14433677A JPS5477070A (en) 1977-12-01 1977-12-01 Production of photo mask

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14433677A JPS5477070A (en) 1977-12-01 1977-12-01 Production of photo mask

Publications (2)

Publication Number Publication Date
JPS5477070A true JPS5477070A (en) 1979-06-20
JPS6122457B2 JPS6122457B2 (https=) 1986-05-31

Family

ID=15359733

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14433677A Granted JPS5477070A (en) 1977-12-01 1977-12-01 Production of photo mask

Country Status (1)

Country Link
JP (1) JPS5477070A (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212002A (en) * 1975-06-30 1977-01-29 Ibm Method of high aspect ratio mask
JPS52136001A (en) * 1976-05-10 1977-11-14 Dainippon Printing Co Ltd Method of adjusting dimensions of lines on photo mask

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5212002A (en) * 1975-06-30 1977-01-29 Ibm Method of high aspect ratio mask
JPS52136001A (en) * 1976-05-10 1977-11-14 Dainippon Printing Co Ltd Method of adjusting dimensions of lines on photo mask

Also Published As

Publication number Publication date
JPS6122457B2 (https=) 1986-05-31

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