JPS5473576A - Spin coating method and spin coater - Google Patents

Spin coating method and spin coater

Info

Publication number
JPS5473576A
JPS5473576A JP14136277A JP14136277A JPS5473576A JP S5473576 A JPS5473576 A JP S5473576A JP 14136277 A JP14136277 A JP 14136277A JP 14136277 A JP14136277 A JP 14136277A JP S5473576 A JPS5473576 A JP S5473576A
Authority
JP
Japan
Prior art keywords
substrate
resist
coating
chamber
base
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14136277A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6214092B2 (enrdf_load_stackoverflow
Inventor
Shuji Kondo
Kazuhiko Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP14136277A priority Critical patent/JPS5473576A/ja
Publication of JPS5473576A publication Critical patent/JPS5473576A/ja
Publication of JPS6214092B2 publication Critical patent/JPS6214092B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP14136277A 1977-11-24 1977-11-24 Spin coating method and spin coater Granted JPS5473576A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14136277A JPS5473576A (en) 1977-11-24 1977-11-24 Spin coating method and spin coater

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14136277A JPS5473576A (en) 1977-11-24 1977-11-24 Spin coating method and spin coater

Publications (2)

Publication Number Publication Date
JPS5473576A true JPS5473576A (en) 1979-06-12
JPS6214092B2 JPS6214092B2 (enrdf_load_stackoverflow) 1987-03-31

Family

ID=15290206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14136277A Granted JPS5473576A (en) 1977-11-24 1977-11-24 Spin coating method and spin coater

Country Status (1)

Country Link
JP (1) JPS5473576A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208832A (ja) * 1983-05-13 1984-11-27 Hitachi Tokyo Electronics Co Ltd 塗布装置
JPS60189936A (ja) * 1984-03-12 1985-09-27 Nippon Kogaku Kk <Nikon> 半導体製造装置
JPS61104623A (ja) * 1984-10-29 1986-05-22 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 回転塗布方法及び回転塗布装置
JP2001198513A (ja) * 2000-01-17 2001-07-24 Dainippon Screen Mfg Co Ltd 基板塗布装置
CN109675744A (zh) * 2017-09-29 2019-04-26 临海市劳尔机械有限公司 一种镜片镀膜喷涂机

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02123591U (enrdf_load_stackoverflow) * 1989-03-22 1990-10-11
JPH0393598U (enrdf_load_stackoverflow) * 1990-01-16 1991-09-24

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59208832A (ja) * 1983-05-13 1984-11-27 Hitachi Tokyo Electronics Co Ltd 塗布装置
JPS60189936A (ja) * 1984-03-12 1985-09-27 Nippon Kogaku Kk <Nikon> 半導体製造装置
JPS61104623A (ja) * 1984-10-29 1986-05-22 インタ−ナショナル　ビジネス　マシ−ンズ　コ−ポレ−ション 回転塗布方法及び回転塗布装置
JP2001198513A (ja) * 2000-01-17 2001-07-24 Dainippon Screen Mfg Co Ltd 基板塗布装置
CN109675744A (zh) * 2017-09-29 2019-04-26 临海市劳尔机械有限公司 一种镜片镀膜喷涂机

Also Published As

Publication number Publication date
JPS6214092B2 (enrdf_load_stackoverflow) 1987-03-31

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