JPS5459263U - - Google Patents

Info

Publication number
JPS5459263U
JPS5459263U JP13190977U JP13190977U JPS5459263U JP S5459263 U JPS5459263 U JP S5459263U JP 13190977 U JP13190977 U JP 13190977U JP 13190977 U JP13190977 U JP 13190977U JP S5459263 U JPS5459263 U JP S5459263U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13190977U
Other languages
Japanese (ja)
Other versions
JPS5527240Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1977131909U priority Critical patent/JPS5527240Y2/ja
Publication of JPS5459263U publication Critical patent/JPS5459263U/ja
Application granted granted Critical
Publication of JPS5527240Y2 publication Critical patent/JPS5527240Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
JP1977131909U 1977-10-03 1977-10-03 Expired JPS5527240Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1977131909U JPS5527240Y2 (enrdf_load_stackoverflow) 1977-10-03 1977-10-03

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1977131909U JPS5527240Y2 (enrdf_load_stackoverflow) 1977-10-03 1977-10-03

Publications (2)

Publication Number Publication Date
JPS5459263U true JPS5459263U (enrdf_load_stackoverflow) 1979-04-24
JPS5527240Y2 JPS5527240Y2 (enrdf_load_stackoverflow) 1980-06-30

Family

ID=29098945

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1977131909U Expired JPS5527240Y2 (enrdf_load_stackoverflow) 1977-10-03 1977-10-03

Country Status (1)

Country Link
JP (1) JPS5527240Y2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015230917A (ja) * 2014-06-03 2015-12-21 三菱電機株式会社 ウエハハンドリング装置、ウエハ用ピンセット

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911658U (enrdf_load_stackoverflow) * 1972-05-08 1974-01-31

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4911658U (enrdf_load_stackoverflow) * 1972-05-08 1974-01-31

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015230917A (ja) * 2014-06-03 2015-12-21 三菱電機株式会社 ウエハハンドリング装置、ウエハ用ピンセット

Also Published As

Publication number Publication date
JPS5527240Y2 (enrdf_load_stackoverflow) 1980-06-30

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