JPS5453685A - Forming apparatus for film in vacuum - Google Patents

Forming apparatus for film in vacuum

Info

Publication number
JPS5453685A
JPS5453685A JP12036277A JP12036277A JPS5453685A JP S5453685 A JPS5453685 A JP S5453685A JP 12036277 A JP12036277 A JP 12036277A JP 12036277 A JP12036277 A JP 12036277A JP S5453685 A JPS5453685 A JP S5453685A
Authority
JP
Japan
Prior art keywords
layer
continuously
operated
discharge
contg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12036277A
Other languages
Japanese (ja)
Other versions
JPS5548589B2 (en
Inventor
Koichi Shinohara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP12036277A priority Critical patent/JPS5453685A/en
Priority to GB53072/77A priority patent/GB1596385A/en
Priority to FR7739205A priority patent/FR2376485A1/en
Priority to CA294,014A priority patent/CA1096968A/en
Priority to DE2758772A priority patent/DE2758772C2/en
Priority to NLAANVRAGE7714538,A priority patent/NL181059C/en
Priority to US06/008,083 priority patent/US4220117A/en
Publication of JPS5453685A publication Critical patent/JPS5453685A/en
Publication of JPS5548589B2 publication Critical patent/JPS5548589B2/ja
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C23C14/562—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks for coating elongated substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To prepare a film structure which is uniform in longer direction, by setting specially the relative positions of gas feed opening and gas discharge opening for each chamber longitudianally arranged in a vacuum vessel. CONSTITUTION:For an example of forming magnetic recording medium by use of the apparatus described above, PETP substrate 21 is laminated with Cr, Fe alternately. I. e., Ar contg. O2 is instroduced continuously into the apparatus through a needle valve 39, and discharge is initiated by the operation of discharge-treating mechanism 23 so as to rotate cans 24, 25, 26 in the direction of an arrow B. Then Cr layer is formed on the substrate 20 while introducing O2 contg. Ar continuously with an exhaust system 18'' closed and an evaporating source 29 operated. Hereafter, Fe layer is formed on the Cr layer while introducing O2 continuously through a needle valve 42 with an evaporating source 36 operated. In the similar way, Cr layer is formed on the Fe layer, then Fe layer on the Cr layer with cans operated in the direction of an arrow A. Alternate layers Cr-Fe-Cr-Fe--- thus formed compares favorably with painted magnetic tape now in practical use.
JP12036277A 1976-12-29 1977-10-05 Forming apparatus for film in vacuum Granted JPS5453685A (en)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP12036277A JPS5453685A (en) 1977-10-05 1977-10-05 Forming apparatus for film in vacuum
GB53072/77A GB1596385A (en) 1976-12-29 1977-12-20 Methods and apparatus for manufacturing magnetic recording media
FR7739205A FR2376485A1 (en) 1976-12-29 1977-12-26 METHOD AND DEVICE FOR MANUFACTURING MAGNETIC BANDS
CA294,014A CA1096968A (en) 1976-12-29 1977-12-28 Method and apparatus for fabrication of magnetic recording media
DE2758772A DE2758772C2 (en) 1976-12-29 1977-12-29 Process for the production of a tape-shaped, magnetic recording medium
NLAANVRAGE7714538,A NL181059C (en) 1976-12-29 1977-12-29 METHOD FOR MANUFACTURING A MAGNETIC REGISTRATION MEDIUM
US06/008,083 US4220117A (en) 1976-12-29 1979-01-31 Apparatus for fabrication of magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12036277A JPS5453685A (en) 1977-10-05 1977-10-05 Forming apparatus for film in vacuum

Publications (2)

Publication Number Publication Date
JPS5453685A true JPS5453685A (en) 1979-04-27
JPS5548589B2 JPS5548589B2 (en) 1980-12-06

Family

ID=14784310

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12036277A Granted JPS5453685A (en) 1976-12-29 1977-10-05 Forming apparatus for film in vacuum

Country Status (1)

Country Link
JP (1) JPS5453685A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878969U (en) * 1981-11-24 1983-05-28 大日本印刷株式会社 Continuous vacuum evaporation equipment for plastic film
EP0122092A2 (en) * 1983-04-06 1984-10-17 General Engineering Radcliffe Limited Vacuum coating apparatus

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5829218U (en) * 1981-08-19 1983-02-25 セイレイ工業株式会社 Partition device for operating section of combine harvester
JPS59105824U (en) * 1982-12-29 1984-07-17 株式会社クボタ Combine engine bonnet mounting device
JPS6110624U (en) * 1984-06-22 1986-01-22 三菱農機株式会社 combine

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140875A (en) * 1974-10-04 1976-04-06 Mitsubishi Electric Corp Handotaisochiniokeru masukuawasehoho

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5140875A (en) * 1974-10-04 1976-04-06 Mitsubishi Electric Corp Handotaisochiniokeru masukuawasehoho

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5878969U (en) * 1981-11-24 1983-05-28 大日本印刷株式会社 Continuous vacuum evaporation equipment for plastic film
JPS6113554Y2 (en) * 1981-11-24 1986-04-26
EP0122092A2 (en) * 1983-04-06 1984-10-17 General Engineering Radcliffe Limited Vacuum coating apparatus

Also Published As

Publication number Publication date
JPS5548589B2 (en) 1980-12-06

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