JPS5451589A - Slit device in mass spectrometer - Google Patents

Slit device in mass spectrometer

Info

Publication number
JPS5451589A
JPS5451589A JP11673677A JP11673677A JPS5451589A JP S5451589 A JPS5451589 A JP S5451589A JP 11673677 A JP11673677 A JP 11673677A JP 11673677 A JP11673677 A JP 11673677A JP S5451589 A JPS5451589 A JP S5451589A
Authority
JP
Japan
Prior art keywords
slit
resolving power
knife
width
low
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11673677A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6112544B2 (https=
Inventor
Eiji Tajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11673677A priority Critical patent/JPS5451589A/ja
Publication of JPS5451589A publication Critical patent/JPS5451589A/ja
Publication of JPS6112544B2 publication Critical patent/JPS6112544B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)
JP11673677A 1977-09-30 1977-09-30 Slit device in mass spectrometer Granted JPS5451589A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11673677A JPS5451589A (en) 1977-09-30 1977-09-30 Slit device in mass spectrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11673677A JPS5451589A (en) 1977-09-30 1977-09-30 Slit device in mass spectrometer

Publications (2)

Publication Number Publication Date
JPS5451589A true JPS5451589A (en) 1979-04-23
JPS6112544B2 JPS6112544B2 (https=) 1986-04-09

Family

ID=14694506

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11673677A Granted JPS5451589A (en) 1977-09-30 1977-09-30 Slit device in mass spectrometer

Country Status (1)

Country Link
JP (1) JPS5451589A (https=)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03138850A (ja) * 1989-10-23 1991-06-13 Hitachi Ltd ２次イオン質量分析装置
WO2007114120A1 (ja) * 2006-03-31 2007-10-11 Ihi Corporation イオン注入装置
JP2020071907A (ja) * 2018-10-29 2020-05-07 三菱電機株式会社 イオン注入装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0546869U (ja) * 1991-12-05 1993-06-22 川崎重工業株式会社 鋼板吸着引付け装置

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03138850A (ja) * 1989-10-23 1991-06-13 Hitachi Ltd ２次イオン質量分析装置
WO2007114120A1 (ja) * 2006-03-31 2007-10-11 Ihi Corporation イオン注入装置
JP2007273368A (ja) * 2006-03-31 2007-10-18 Ihi Corp イオン注入装置
US7964856B2 (en) 2006-03-31 2011-06-21 Ihi Corporation Ion implanting apparatus
JP2020071907A (ja) * 2018-10-29 2020-05-07 三菱電機株式会社 イオン注入装置

Also Published As

Publication number Publication date
JPS6112544B2 (https=) 1986-04-09

Similar Documents

Publication Publication Date Title
JPS5234785A (en) Mass spectrometer
JPS5451589A (en) Slit device in mass spectrometer
JPS53114685A (en) Manufacture for semiconductor device
JPS5241583A (en) Ion detecting device for mass analyzer
JPS52136496A (en) Apparatus for ion beam machining
JPS5217886A (en) Multikind ion detector
JPS5230474A (en) Apparatus for measuring power line current
JPS53120582A (en) Spectrophotometer
JPS51137489A (en) Combustion type water analyser
JPS5327487A (en) Sample analyzer
JPS51140641A (en) Optical fiber variable attenuator
JPS529366A (en) Sample equipment for electron microscopes, etc
JPS5337448A (en) Indicating mechanism
JPS539460A (en) Voltage detecting relay
JPS52137256A (en) Electron microscope
JPS52111789A (en) Ion source device for mass spectrometer
JPS5311566A (en) 4-pole lens
JPS51142311A (en) Method for examining a visual function by leadinga visual line in an o phthalmological instrument
JPS5230378A (en) Movable diaphragm
JPS5327486A (en) Sample analyzer
JPS5439683A (en) Sample holder for analysis
JPS5360660A (en) Thickness measuring device for lpe film
Novikov et al. Magnetic spectrometer ionic-optical and design parameter effect on the apparatus line form
柴田祥一 et al. 5p-F-11 THE NAGOYA COSMIC-RAY MUON SPECTROMETER (II): WIDE GAP SPARK CHAMBER
JPS5236088A (en) Ion generating device