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Hitachi Ltd
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Hitachi Ltd
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Application filed by Hitachi LtdfiledCriticalHitachi Ltd
Priority to JP6981577ApriorityCriticalpatent/JPS544832A/en
Publication of JPS544832ApublicationCriticalpatent/JPS544832A/en
PURPOSE: To enable to always obtain a constant velocity of ion milling, by carrying out ion milling after shuttering the material to be processed and purifying the ion gun part by plasma and Ar gas.